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JP7238461B2 |
A valve control apparatus comprises: a generator configured to generate a first set pressure signal; and a valve opening controller configured to perform the first valve opening control on the basis of the target pressure and, after the ...
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JP7236698B2 |
To provide a valve device which prevents entry of foreign objects into the valve device, and to provide a gas consuming unit.A relief body 41 is formed into a ring shape fitted on a cylindrical body part 13 so as to move forward or rearw...
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JP7236697B2 |
To provide a valve device which can be attached to a storage container to restrict conduction of a fluid and achieve downsizing even if the valve device includes a relief valve for releasing excessive pressure larger than a predetermined...
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JP7234909B2 |
An oil passage portion forms a part of an oil supply passage inside. A check valve part includes a valve seat portion press-fitted into the oil passage portion. The check valve part allows flow of hydraulic oil from a hydraulic oil suppl...
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JP7233752B2 |
To provide a valve device enabling suppression of an increase in frequency of the maintenance thereof while avoiding jamming of scale in the initial stage, and to provide a pressure reducing valve using the same.A valve device 34 compris...
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JP7231765B2 |
A coolant valve for a motor vehicle. The coolant valve includes a housing with an inlet and an outlet, a valve seat which surrounds a flow cross-section formed between the inlet and the outlet, and a control body which is placeable on an...
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JP2023507299A |
The manifold body has at least a first valve body segment and a second valve body segment each comprising an upper outer wall defining a valve cavity and a lower base defining one or more flow ports, and an integrated leak test port. a f...
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JP7224366B2 |
An electronic expansion valve (100), comprising a valve body (10), a valve needle assembly (20), a screw rod assembly (30), a rotor assembly (50), a stator assembly, and a sleeve tube (40), a guide sleeve (16) for guiding the movement of...
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JP7220663B2 |
A valve (1) having at least one closure member (2) for closing a valve opening (3) and at least one valve rod (4), at least one first connecting section (5) being provided in or on the valve rod (4), at least one second connecting sectio...
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JP2023018704A |
To provide an air valve which enables efficient suctioning and exhausting of air.An air valve 1 includes: a valve casing having a valve casing hollow part 2a therein and having a valve casing flange part 22 in a periphery near an upper o...
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JP2023504977A |
A sealing unit (12) is provided for sealing or sealing the closure plate (7) against the walls (3, 32). A sealing unit (12) comprises a support frame (13). The support frame (13) comprises a first vertical beam portion (14) and a second ...
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JP7218606B2 |
To provide a linear solenoid valve that can effectively control a strainer from shifting on a radial outside, and to provide a hydraulic control device.A linear solenoid valve includes a strainer 50 fitted to a sleeve so as to cover a po...
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JP7216497B2 |
To provide a pressure reduction valve without size increase while reducing the risk of fluid leakage.A pressure reduction valve 1 that reduces the pressure of primary pressure fluid flowing from external piping 75 to a secondary pressure...
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JP2023014453A |
To provide a steam valve device in a shell mount type structure, and a steam turbine which is equipped therewith, and which can use high temperature and high pressure working fluid while increasing the size of a valve bore, for preventin...
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JP2023502921A |
The valve (100) includes a housing (102) having at least one inlet (104a) and at least one outlet (104b), and positioned within the housing (102) such that, in use, the gas from the inlet (104a) of the valve (100) a valve member (108) mo...
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JP2023502660A |
The present invention is a gas inlet valve (1) for the controlled admission of process gas into a vacuum process chamber, the gas inlet valve comprising - a gas inlet (21), a gas outlet (22) and an internal volume. A gas-distribution uni...
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JP2023012205A |
To provide a wear measurement device which can measure a wear amount of a stem bush without using a special jig at each type of a valve drive unit, and a wear measurement method.In a wear measurement device 10 for measuring a wear amount...
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JP2023008923A |
To provide a vacuum control valve or a vacuum processing system that provides accurate control or adjustment of a valve aperture, provides accurate control or adjustment of a flow passing through the aperture, and provides a homogeneous ...
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JP2023000931A |
To provide a linear solenoid valve control device with improved ability to discharge foreign matter trapped inside.An electronic control unit 90 of a linear solenoid valve SL performs (a) specific foreign matter discharge control to disc...
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JP2022191927A |
To provide an automatic valve with a cleaning mechanism capable of removing foreign matter by surely turning a valve stem.When drain at high temperature flows into a valve chamber 53, each bimetal 50 is expanded; a valve stem 10 is moved...
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JP2022191928A |
To provide an automatic valve with a cleaning mechanism capable of surely removing foreign matter adhering to the vicinity of a valve port.A valve stem 10 is held in a valve chamber of a temperature adjustment trap movably in directions ...
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JP2022190803A |
To provide a control valve capable of restraining clogging caused by impurities.A control valve includes: a sleeve; a spool which is stored in the sleeve and is moved between a first position for opening a flow passage of fluid supplied ...
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JP7194422B2 |
To provide a valve that allows for detection of axial deviation between a drive shaft of an actuator and a stem at assembly to check whether the axial deviation is within an allowable range.A valve includes: a valve body 2 having a commu...
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JP2022186626A |
To provide a valve plate which can be mounted on and removed from a carrier in a straightforward and reliable manner.A valve plate is provided with at least one tab (14) which protrudes from a rear side thereof (4). The at least one tab ...
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JP2022552078A |
A closure member (5) closes the valve housing openings (6)(7) in the closed position and opens the valve housing openings (6)(7) in the open position. An attachment housing (9) and a thrust pipe (10) together enclose a conduit hollow spa...
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JP2022186627A |
To provide a vacuum valve that allows each of a first valve opening and a second valve opening to be sealed by each of a first valve plate and a second valve plate, in an alternate manner.In a blocked state, a closure unit (8) situated i...
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JP7185545B2 |
To provide a partition valve capable of suppressing contamination of an object to be treated due to dust scattered from a portion that is rubbed with opening/closing operation of the partition valve.A partition valve is arranged at a pos...
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JP7183989B2 |
To provide a valve control device capable of improving responsiveness while securing the control stability of feedback control.A valve control device 2 includes: a storage part 23 for storing a feedback gain set corresponding to a parame...
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JP2022177825A |
To provide an improved high-frequency grounding device for a vacuum valve of a vacuum chamber system, for avoiding undesired plasma discharges in the vacuum chamber system.A high-frequency grounding device (40) for use with a vacuum valv...
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JP7179455B2 |
A method for inspecting an erroneous/missing part of a discharge valve structure according to the present invention is a method for inspecting the erroneous/missing part of the discharge valve structure of a compressor. The discharge val...
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JP7176967B2 |
To strength hydraulic pressure leak prevention effect.A telescopic vacuum actuator 70 for pressing an object in a chamber which is brought into a vacuum atmosphere has: a guide rod 771 having a penetration hole 771c in an axial direction...
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JP7168329B2 |
A valve system having a vacuum valve with a valve seat having a valve opening defining an opening axis and a first sealing surface around the valve opening, a valve closure having a second sealing surface and a drive unit coupled to the ...
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JP2022546796A |
A vacuum valve (1) for loading and unloading a vacuum chamber (2) is provided with a closing plate (3). A closing plate (3) is pressed against the valve seat (4) in the closed position to close the loading and unloading opening (5) and i...
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JP7164491B2 |
A vacuum valve includes a valve plate and an actuator 12 that drives the valve plate, in which the actuator 12 includes a shaft 16 that is connected to the valve plate, a drive unit that is disposed side by side with the shaft 16 in a ra...
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JP7163009B2 |
To provide a high-temperature slide member that prevents abnormal hardening from occurring in a padding weld part due to high temperature during use, and that can prevent cracking from occurring in the padding weld part due to reduction ...
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JP3239559U |
A vacuum process system capable of suppressing an increase in the defect rate, immediately detecting the occurrence of an abnormal phenomenon, and immediately determining a countermeasure, and its smart valve are provided. A vacuum proce...
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JP7158099B2 |
To provide a water level control valve failure determination system or the like capable of objectively determining a failure of a water level control valve.A water level control valve failure determination system 10 determines a failure ...
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JP7155999B2 |
A vacuum valve for driving a valve body arranged facing a valve opening up and down relative to the valve opening to perform valve opening/closing operation, comprises: a first up-down driver configured to drive the valve body up and dow...
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JP2022544558A |
A non-return valve for a vacuum system is disclosed. The valve has a baffle extending across the flow path of the vacuum system, the baffle including an opening and a valve seat surrounding the opening. The valve also includes a valve me...
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JP7155143B2 |
The invention relates to a suction device (12) comprising a valve housing (18), a flexible partition wall (28) which runs in such a way that a control space (30) extends on one side and an intake side (21) lies on the other side, wherein...
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JP2022159077A |
To provide a seal carrier ring that can highly accurately regulate or meter the volumetric flow rate through a valve opening by opening and closing the valve opening.A basic body (4) has a first side, on which a seal carrier ring (1), in...
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JP2022543883A |
Solenoid-based vent valve 24 consists of housing 1 , solenoid coil 2 , flexible diaphragm 6 , plunger 8 , filter inlet 28 and filter outlet assembly 100 . The flexible diaphragm 6 is overmolded with the plunger 8 to seal the flexible dia...
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JP7152194B2 |
To provide a fluid trap having cleaning means capable of surely recognizing the end of cleaning treatment with a simple structure.When a jamming state occurs in a valve port 50a of a steam trap 90 due to adhesion of foreign materials, an...
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JP2022152078A |
To enable comparing soundness indexes of valves of a plurality of plants with each other.A valve soundness diagnosis system includes: a valve specification information obtaining unit 1 that obtains specification information on a valve su...
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JP7146262B2 |
To enhance foreign substance resistance of a control valve.A control valve 1 includes: a body 5 which has a first chamber 26 communicated with a first port 14, a second chamber 23 communicated with a second port 12, and a guide hole 25 p...
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JP2022143882A |
To provide a strainer and a foot valve capable of ensuring a sufficient opening area.A strainer 50 includes: a second flange 51 that has at a second opening 55 and a third bolt hole 56 formed around the second opening 55; and a strainer ...
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JP7142348B2 |
To provide a valve gear which prevents a high temperature fluid from leaking to the outside to achieve a scale removing function sufficiently when the fluid and scale are discharged to the outside through a valve port by forced valve ope...
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JP2022138462A |
To provide a substrate processing apparatus and a supply valve that can eliminate air bubbles caused by open/close valves.A supply valve 21 has a configuration (open/close valve chamber 65, valve seat 71, diaphragm 73, and open/close dri...
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JP7141418B2 |
In a non-sealed butterfly valve, a butterfly valve element includes a downstream end face that faces a downstream side of a flow passage during valve closing and a maximum outer diameter portion that makes a gap with a minimum distance. ...
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JP2022136587A |
To provide a valve for powder with which powder can be easily dispensed, and by ensuring the removal of powder adhering to the surface of a valve body, etc., not only makes cleaning work easier, but also makes powder hard to adhere to th...
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