Title:
真空バルブ及び真空バルブに用いられるアクチュエータ
Document Type and Number:
Japanese Patent JP7164491
Kind Code:
B2
Abstract:
A vacuum valve includes a valve plate and an actuator 12 that drives the valve plate, in which the actuator 12 includes a shaft 16 that is connected to the valve plate, a drive unit that is disposed side by side with the shaft 16 in a radial direction of the shaft 16 and includes a ball screw shaft 24 and a motor 26 that rotates the ball screw shaft 24, and a connection part 28 that connects the ball screw shaft 24 and the shaft 16.
Inventors:
Byers Emmanuel
Application Number:
JP2019109400A
Publication Date:
November 01, 2022
Filing Date:
June 12, 2019
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
F16K51/02; F16K31/04; F16K49/00
Domestic Patent References:
| JP2018509570A | ||||
| JP2005061437A | ||||
| JP2011158096A | ||||
| JP8042734A | ||||
| JP2017227325A | ||||
| JP6087761U |
Attorney, Agent or Firm:
Morishita Kenki
Teruo Tomisho
Teruo Tomisho