| Document |
Document Title |
|
JP2024018621A |
[Problem] To appropriately set a threshold value in valve diagnosis. [Solution] A diagnostic support device stores the type and specifications of a valve with a proven operating record, information on the fluid handled by the valve with ...
|
|
JP2024505684A |
A valve (1), wherein a valve disc (5) is arranged in a valve housing interior (6) of a valve housing (2) and is fixed to a shaft (7), the valve disc (5) Together with the shaft (7), it is reciprocatable between a closed position and an i...
|
|
JP2024014564A |
The present invention provides a control device, a substrate processing system, and a control method for a vacuum valve device that reduce the occurrence of operational abnormalities during the open operation of the vacuum valve device. ...
|
|
JP7426495B2 |
A diagnosis apparatus for a valve system including a control valve, a servo valve for driving the control valve, and at least one servo module for providing a control signal based on an opening degree command value for the control valve ...
|
|
JP2024504498A |
The valve plate for the closing device, which closes the opening (2) provided in the wall (3) in a vacuum-tight manner, has a sealing ring (8) on the front side that seals against the wall (3), and the valve plate of the closing device I...
|
|
JP2024504497A |
A closing device for vacuum-tightly closing an opening (2) provided in a wall (3) has a valve plate (1) for opening and closing the opening (2), which valve plate (1) is connected to a valve rod (4). ) via a coupling device. The coupling...
|
|
JP7424447B2 |
To provide a controller capable of improving pressure regulation response in a valve system including a plurality of vacuum valves.A valve system controller includes a pressure regulating controller 121 for outputting the same pressure r...
|
|
JP7419976B2 |
To allow a decrease in conductance for exhaust to be restrained while recoil particles are trapped.A vacuum valve adjusts an opening area of an exhaust flow passage, and comprises: a valve element for adjusting the opening area of the ex...
|
|
JP7411242B2 |
To provide a valve device enabling suppression of an increase in frequency of the maintenance thereof while avoiding jamming of scale in the initial stage, and to provide a pressure reducing valve using the same.A valve device 34 compris...
|
|
JP7409651B2 |
To provide a cleaning system of an automatic valve capable of quickly and surely eliminating a clogging state.In a case when a clogging state caused by foreign matters such as scale, occurs at an orifice 61 in a lower trap 1, drain flows...
|
|
JP2024000877A |
[Problem] To adjust a reference pressure for starting drainage without disassembling equipment. [Solution] A fluid device (centrifugal pump 301) includes a casing ( A spiral casing 302) and a cock 101 connected to the through hole and in...
|
|
JP7408656B2 |
A method of manufacturing a check valve may include forming an upper housing as cylindrical body with (i) an internal surface including an upstream internal surface and a downstream internal surface having a projection and (ii) an extern...
|
|
JP3245118U |
The present invention provides a seal airbag damage protection structure for a dome valve, which enables quick and efficient connection between a conduit and a valve body. [Solution] The monitoring mechanism includes a valve body 1, a mo...
|
|
JP7398805B2 |
To provide a valve device with an automatic cleaning function which prevents scale deposition, and a pressure reduction valve employing the same.A valve device with an automatic cleaning function comprises: a valve body 32 which performs...
|
|
JP2023174108A |
To easily perform calibration for setting correspondence between an operation tool manipulated variable and a flow rate of supply to a hydraulic actuator to set relationship.A control valve 6 which controls a flow rate of supply to a hyd...
|
|
JP7385400B2 |
A compact vacuum gate valve capable of reducing a kink and sliding between a seal material and a seal surface, achieving a low occurrence of particles, stably and reliably performing valve-body open-close movements, restricting impulsive...
|
|
JP7378149B2 |
To provide a valve gear with a rotary automatic cleaning function which prevents deposits of scales, and to provide a pressure reduction valve using the valve gear.A valve gear 34 includes: a valve body 32 which opens and closes in an ar...
|
|
JP2023160086A |
To achieve simplification of a structure, reduction of the number of components, and simplification of assembly work, prevent entry of foreign objects, and retain a sleeve at a predetermined position to secure functional reliability in a...
|
|
JP7372246B2 |
A piston-cylinder unit having a cylinder housing (1) with a cylinder interior (2) and a piston (3) arranged in cylinder interior (2), from which a piston rod (4) starts and is guided out from the cylinder housing (1) through an opening a...
|
|
JP7370588B2 |
To provide a fluid opening/closing device capable of preventing malfunction of a gate valve.A fluid opening/closing device 1 is constituted so that a first valve element slides by contact with an inlet-side first annular seal member and ...
|
|
JP7368236B2 |
Disclosed is a vacuum valve having a valve closure and having a drive unit which is coupled to the valve closure and which has at least one adjustment element. The vacuum valve furthermore has a position sensor, in particular a travel or...
|
|
JP7366644B2 |
To provide a valve device which is unlikely to bite in an object to circulate between a valve body and sheet member.A valve device includes: a valve body having a through communication passage; a housing which has a valve body housing ch...
|
|
JP7365749B2 |
A vacuum pressure control system that can easily calculate an optimum valve open degree of a vacuum control valve for making a pressure value of a vacuum chamber agree with a target value is provided. A controller approximates a relation...
|
|
JP7361534B2 |
To provide a relief valve device which can operate a valve body for easily eliminating the clogging of foreign matters while reducing a space necessary for the operation without removal or dismantling.A relief valve device 30 for lowerin...
|
|
JP2023152098A |
To detect an abnormal state in which a solenoid valve is clogged with a foreign substance and cannot operate normally.A deterioration diagnostic device for a solenoid valve comprises a control unit that diagnoses deterioration of a solen...
|
|
JP2023151607A |
To provide a gate valve device and a semiconductor manufacturing device that reduce the volume of a driving part for driving a valve element.A gate valve device comprises a case comprising an opening part, a valve element for opening/clo...
|
|
JP2023148364A |
To provide a slide type switch valve and a refrigeration cycle system eliminating the need of difficult machining such as burring, and capable of reducing product costs.A pilot valve 2 is equipped with a valve housing 20 made of stainles...
|
|
JP2023148891A |
To obtain, as one example, an electromagnetic valve which can suppress an influence of foreign matters to performance.An electromagnetic valve of the present embodiment comprises, as one example: a coil; a plunger energized in a first di...
|
|
JP2023542470A |
This is a guide frame (100) for a four-way switching valve, and the guide frame (100) includes a frame body (10), and a connection part (11) is provided at each end of the frame body (10). 11) includes a first folding member (111) and a ...
|
|
JP2023142505A |
To provide a pressure control valve which is provided below a vacuum chamber in a compact form and perform uniform treatment to a processed object in the vacuum chamber by using a process gas.A pressure control valve 1 includes: a valve ...
|
|
JP7354418B2 |
Embodiments of symmetric flow valves for use in a substrate processing chamber are provided herein. In some embodiments, a symmetric flow valve includes a valve body having sidewalls, a bottom plate, and a top plate that together define ...
|
|
JP7353984B2 |
Disclosed is a vacuum valve including a valve closure and a preferably pneumatic or electro-pneumatic drive unit having a pressure medium, said drive unit being coupled to the valve closure. The vacuum valve also has a pressure sensor su...
|
|
JP7354445B2 |
Disclosed are a stator assembly, an electronic expansion valve, and a refrigeration device. The stator assembly includes a housing, a coil assembly and a fixing member. An outer surface of the housing is provided with an installation ope...
|
|
JP7352286B2 |
To allow easy operation of operation parts.A valve 100 includes a casing 1 in which fluid circulates, a first operation part 6 supported by a screw mechanism so as to move through the casing 1 in an axis X direction, a second operation p...
|
|
JP2023540876A |
A valve seat (10) in which a first accommodation chamber is provided, and a throttle valve core (20) provided in the first accommodation chamber and provided with a first orifice (21) and a second orifice (22a) or flow hole (22b). ), and...
|
|
JP7350658B2 |
Disclosed is a vacuum valve with a sensor arrangement having at least one inertial sensor, where the sensor arrangement is designed in such a way it detects a measuring signal with respect to an acceleration impacting on the valve.
|
|
JP7349739B2 |
To provide a valve gear for allowing the maintenance of a valve without disassembling the gear, and a pressure reduction valve using the same.A valve gear 34 includes: a valve element 32 for opening/closing a space between an inflow path...
|
|
JP7349512B2 |
The present disclosure provides a pilot valve and a four-way reversing valve. The pilot valve includes: a valve body, wherein the valve body is a cylinder formed by integrally stretching and having an open end and a closed end, the close...
|
|
JP2023133133A |
To provide a vacuum valve capable of being reliably operated and having higher energy efficiency.A vacuum valve includes: a valve housing defining a passage connecting a first opening 18 and a second opening 20; a valve body and a comple...
|
|
JP2023130760A |
To provide a pressure control valve that prevents process gas from cooling during vacuum chamber evacuation and prevents particle generation.A pressure control valve 1 that opens and closes a circular exhaust port 15 connecting a vacuum ...
|
|
JP7348369B2 |
The present disclosure provides a valve apparatus that prevents defects in the valve apparatus and prevents damage to the heat insulating material due to a cryogenic liquid fluid, and a semiconductor processing device including the same ...
|
|
JP7344399B2 |
Disclosed are a slit valve apparatus and a method for controlling a slit valve. The slit valve apparatus includes a slit valve assembly and a servo-control system in communication with the slit valve assembly. The slit valve assembly inc...
|
|
JP2023123967A |
To provide a valve device capable of reducing costs and securing maintainability, required for adding a function for supplying cleaning liquid into a steam turbine, and a valve lid.A valve device comprises a valve box in which an inlet f...
|
|
JP2023537938A |
A vacuum system check valve includes a baffle extending across a flow path of the vacuum system and a valve member. The baffle has an opening with a valve seat around the perimeter of the opening. The valve member has a curved sealing su...
|
|
JP7339162B2 |
Disclosed is a vacuum valve having at least one acoustic sensor, the acoustic sensor being designed such that information can be generated by the acoustic sensor via a structure-borne sound wave, as a measuring signal, impacting on at le...
|
|
JP7338597B2 |
To suppress erroneous determination of abnormality of a tank valve without increasing gas discharge force.A pressure of a closed space is detected by a sensor provided with the closed space formed at a downstream side from a tank valve a...
|
|
JP3243586U |
A pneumatically driven vacuum valve capable of improving airtightness and preventing fluid leakage is provided. A pneumatically operated vacuum valve comprising a pneumatically operated valve assembly (10) comprising a conical valve body...
|
|
JP2023120867A |
To provide a non-contact valve capable of suppressing the generation of metallic foreign matters, and a method of supplying PBT pellets.Provided is a non-contact valve for supplying PBT pellets including a casing (1) having an inlet port...
|
|
JP7335619B2 |
To provide a valve device preventing scale deposition and a pressure reduction valve using the same.A valve device 34 comprises: a cylindrical valve body 32 that opens and closes a space between an inflow passage 62 and an outflow passag...
|
|
JP2023536809A |
The present invention includes a block body including a valve portion having an opening/closing portion that contracts and expands, a drive portion that drives the opening/closing portion, and an accommodating portion that accommodates t...
|
