Title:
圧力センサを備えた真空弁
Document Type and Number:
Japanese Patent JP7353984
Kind Code:
B2
Abstract:
Disclosed is a vacuum valve including a valve closure and a preferably pneumatic or electro-pneumatic drive unit having a pressure medium, said drive unit being coupled to the valve closure. The vacuum valve also has a pressure sensor such that a pressure of the pressure medium can be measured.
More Like This:
| JP4803541 | Gate valve |
| JP3239559 | Vacuum process system and its smart valve |
| JP7106062 | Vacuum valve |
Inventors:
Adrian Eschen Moser
Andreas Hofer
Andreas Hofer
Application Number:
JP2019566095A
Publication Date:
October 02, 2023
Filing Date:
June 28, 2018
Export Citation:
Assignee:
Bat holding arg
International Classes:
F16K51/02; F16K3/18
Domestic Patent References:
| JP2000163137A | ||||
| JP200390457A | ||||
| JP777471A | ||||
| JP2011513832A | ||||
| JP2010534302A | ||||
| JP2013234959A |
Foreign References:
| US20100229975 |
Attorney, Agent or Firm:
Einzel Felix-Reinhard
Taku Morita
Junichi Maekawa
Hiroyasu Ninomiya
Ueshima class
Taku Morita
Junichi Maekawa
Hiroyasu Ninomiya
Ueshima class