Title:
真空用ゲートバルブ
Document Type and Number:
Japanese Patent JP7385400
Kind Code:
B2
Abstract:
A compact vacuum gate valve capable of reducing a kink and sliding between a seal material and a seal surface, achieving a low occurrence of particles, stably and reliably performing valve-body open-close movements, restricting impulsive sound and vibrations, and also having high durability. The vacuum gate valve includes housing bodies, a valve-body open/close driving body, and a stem provided with a valve body. Each of the housing bodies has therein a piston rod and a cam member with a cam groove. On each side of the valve-body open/close driving body, a cam roller and a fulcrum roller are provided. On an inner side of the housing body, a vertical movement guiding part and a stopper part are provided. A spring for causing the valve-body open/close driving body to ascend is provided between the valve-body open/close driving body and a fixed base part on a fixed side.
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Inventors:
Toshiaki Iwabuchi
Application Number:
JP2019147617A
Publication Date:
November 22, 2023
Filing Date:
August 09, 2019
Export Citation:
Assignee:
KITTS Co., Ltd.
International Classes:
F16K3/18; F16K51/02
Domestic Patent References:
JP201871642A | ||||
JP2003156171A | ||||
JP2001165350A | ||||
JP2004197769A | ||||
JP201387814A |
Foreign References:
US6173938 | ||||
WO2013161387A1 |
Attorney, Agent or Firm:
Tetsuo Kobayashi