Title:
PRESSURE CONTROL VALVE
Document Type and Number:
Japanese Patent JP2023142505
Kind Code:
A
Abstract:
To provide a pressure control valve which is provided below a vacuum chamber in a compact form and perform uniform treatment to a processed object in the vacuum chamber by using a process gas.SOLUTION: A pressure control valve 1 includes: a valve body 50 incorporated in a body 10 in which an inlet side opening 11 connected to a vacuum chamber D1 from below and an outlet side opening 12 connected to a vacuum pump P are disposed facing each other; and a valve body drive mechanism 60 which moves the valve body 50 along a center line C of the inlet side opening 11 to a closed position where the valve body 50 closes the inlet side opening 11 and an open position.SELECTED DRAWING: Figure 4
Inventors:
IWABUCHI TOSHIAKI
Application Number:
JP2022049454A
Publication Date:
October 05, 2023
Filing Date:
March 25, 2022
Export Citation:
Assignee:
KITZ SCT KK
International Classes:
F16K51/02
Attorney, Agent or Firm:
Tetsuo Kobayashi