Title:
スリットバルブガス圧制御
Document Type and Number:
Japanese Patent JP7344399
Kind Code:
B2
Abstract:
Disclosed are a slit valve apparatus and a method for controlling a slit valve. The slit valve apparatus includes a slit valve assembly and a servo-control system in communication with the slit valve assembly. The slit valve assembly includes at least one gate able to transition between an open position and a closed position, at least one pneumatic actuator, at least one proportional pneumatic valve including a plurality of controllers, and a continuous position sensor. The servo-control system includes a centralized controller that generates a control signal and adjusts the movement of the at least one gate based on the position trajectory for the gate, a linear position measurement of the gate from the continuous position sensor, and fluid pressure/flow measurements from the plurality of controllers.
More Like This:
| JPH0513549 | VACUUM TRANSFER TREATMENT DEVICE |
| JPS5610918 | HOLDER FOR SEMICONDUCTOR WAFER |
Inventors:
Wilt, Paul Zee.
Amir, Ofel
Kuchar, Michael Sea.
Amir, Ofel
Kuchar, Michael Sea.
Application Number:
JP2022558401A
Publication Date:
September 13, 2023
Filing Date:
March 30, 2021
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/677; F16K3/02; F16K31/124; F16K31/42; F16K51/02; G05D16/20
Domestic Patent References:
| JP3198694U |
Foreign References:
| US20020092569 |
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation