Title:
真空室用の流体開閉装置、真空室用のゲートバルブ装置及び流体の開閉方法
Document Type and Number:
Japanese Patent JP7370588
Kind Code:
B2
Abstract:
To provide a fluid opening/closing device capable of preventing malfunction of a gate valve.SOLUTION: A fluid opening/closing device 1 is constituted so that a first valve element slides by contact with an inlet-side first annular seal member and an inlet-side second annular seal member by first gate valve opening/closing control means 4, a vacuum chamber inlet-side passage 21 is closed when a first closing portion 51A is positioned at an opening portion of the vacuum chamber inlet-side passage 21, the vacuum chamber inlet-side passage 21 is opened when a first valve element-side opening portion 51B is positioned at the opening portion of the vacuum chamber inlet-side passage 21, a second valve element slides by contact with an outlet-side first annular seal member and an outlet-side second annular seal member by second gate valve opening/closing control means, a vacuum chamber outlet-side passage is closed when a second closing portion 51A' is positioned at an opening portion of the vacuum chamber outlet-side passage, and the vacuum chamber outlet-side passage is opened when a second valve element-side opening portion 51B' is positioned at the opening portion of the vacuum chamber outlet-side passage.SELECTED DRAWING: Figure 1
Inventors:
Yoshikazu Taniguchi
Application Number:
JP2020087286A
Publication Date:
October 30, 2023
Filing Date:
May 19, 2020
Export Citation:
Assignee:
Fuji Technology Co., Ltd.
International Classes:
F16K51/02; F16K3/00; F16K3/02; F16K3/312
Domestic Patent References:
| JP2019533123A | ||||
| JP2019043741A |
Attorney, Agent or Firm:
Ichiro Irie