Title:
真空バルブ、バルブシステム、バルブシステムの制御装置および校正装置
Document Type and Number:
Japanese Patent JP7424447
Kind Code:
B2
Abstract:
To provide a controller capable of improving pressure regulation response in a valve system including a plurality of vacuum valves.SOLUTION: A valve system controller includes a pressure regulating controller 121 for outputting the same pressure regulating opening degree signal θs to the plurality of vacuum valves on the basis of a pumping speed per unit and volume per unit obtained by dividing a pumping speed Se of an overall valve system comprising a plurality of vacuum pumps 2 and a plurality of vacuum valves and a volume V0 of a chamber 3 by the number n of vacuum valves, a pressure Pg of the chamber 3, and a target pressure value Ps of the chamber 3.SELECTED DRAWING: Figure 3
Inventors:
Masaya Nakamura
Junichiro Kozaki
Junichiro Kozaki
Application Number:
JP2022157947A
Publication Date:
January 30, 2024
Filing Date:
September 30, 2022
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
F16K51/02; G05D16/20
Domestic Patent References:
| JP2013019028A | ||||
| JP2018112933A | ||||
| JP2011134164A | ||||
| JP56146083A |
Foreign References:
| CN106762538A |
Attorney, Agent or Firm:
Hiroyuki Eguchi
Koji Akutsu
Akira Senoo Exhibition
Masayuki Kishimoto
Koji Akutsu
Akira Senoo Exhibition
Masayuki Kishimoto