Title:
仕切弁
Document Type and Number:
Japanese Patent JP7185545
Kind Code:
B2
Abstract:
To provide a partition valve capable of suppressing contamination of an object to be treated due to dust scattered from a portion that is rubbed with opening/closing operation of the partition valve.SOLUTION: A partition valve is arranged at a position where vacuum tanks having an internal space for subjecting an object to be treated to vacuum treatment are connected to each other, and is opened/closed with respect to an opening part for communicating the internal spaces of the connected vacuum tanks. A portion that is rubbed with the opening/closing operation is internally present, and a housing is arranged so as to surround the part.SELECTED DRAWING: Figure 1
Inventors:
Yasumasa Ito
Kosuke Maekawa
Kasai Arata
Osamu Nakaune
Kosuke Maekawa
Kasai Arata
Osamu Nakaune
Application Number:
JP2019018961A
Publication Date:
December 07, 2022
Filing Date:
February 05, 2019
Export Citation:
Assignee:
ULVAC, Inc.
ULVAC Deposition Co., Ltd.
ULVAC Deposition Co., Ltd.
International Classes:
F16K27/12; F16K51/02
Domestic Patent References:
| JP2000337553A | ||||
| JP7293744A | ||||
| JP2005076845A | ||||
| JP2010161169A | ||||
| JP2018098377A |
Foreign References:
| WO2018168878A1 |
Attorney, Agent or Firm:
Shu Oikawa
Tomomasa Katsumata
Ryo Tsuchiya
Tomomasa Katsumata
Ryo Tsuchiya