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WO/2022/130882A1 |
This power transmission device comprises: a pole piece (25) that has a plurality of magnetic bodies and rotates by modulating a magnetic flux between a drive-side magnet (20) and a fixed magnet (40); and a sealing member (51) that divide...
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WO/2022/123973A1 |
This control valve comprises: a spool (1); a spool receiving portion (2s) which receives the spool so that the spool is free to move along the spool axis direction; a sleeve portion (2) having a supply port (2p) penetrating the sleeve po...
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WO/2022/122585A1 |
Disclosed is a vacuum valve (10) for substantially gas-tightly sealing a first valve port (31), comprising a valve seat (30), a sealing element (20) for substantially gas-tightly sealing the first valve port (31), and a drive unit (40) f...
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WO/2022/116550A1 |
An electromagnetic valve having a hard sealing structure, comprising a valve body (1) in which a fluid channel and an accommodating cavity are provided, and a valve assembly mounted in the accommodating cavity. The fluid channel is commu...
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WO/2022/084174A1 |
The invention relates to a vacuum valve system (10) for closing a first valve opening (31) for a vacuum transport system in a substantially gas-tight manner, having: a valve seat assembly (30) which has a first valve opening (31) that de...
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WO/2022/084172A1 |
The invention relates to a vacuum valve for closing a valve opening for a vacuum transport system in a gas-tight manner. The vacuum transport system has a transport tube with multiple transport tube segments for transporting a vehicle in...
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WO/2022/065527A1 |
The present invention relates to a vacuum valve equipped with a circular tube-type inflected barrier film, wherein the accumulation of exhaust gas powder can be minimized while effectively blocking exhaust gas passing through a valve bod...
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WO/2022/062742A1 |
Provided is a guide frame (100) for a four-way reversing valve; the guide frame (100) comprises a frame body (10); each of the two ends of the frame body (10) is provided with a connection part (11); the connection part (11) comprises a ...
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WO/2022/065528A1 |
The present invention relates to a vacuum valve having a protective cover for protecting a barrier film which protects a barrier film that prevents an exhaust gas passing through a valve main body from flowing into a valve driver, thereb...
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WO/2022/045114A1 |
This device for diagnosing a valve system, which includes a control valve, a servo valve for driving the control valve, and at least one servo module for sending a control signal based on an aperture command value for the control valve t...
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WO/2022/043333A1 |
Seal for a vacuum valve comprising a circular base element, wherein the base element has a non-circular cross-section having an outer side extending in an axial direction and an inner side extending radially such that the inner side of t...
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WO/2022/031399A1 |
Embodiments described herein relate to a valve for semiconductor processing. The valve includes a valve body having an inlet conduit and an outlet conduit separated by a diaphragm body. The diaphragm body includes a motor, a transmission...
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WO/2022/018879A1 |
Provided are a valve thermal insulating structure and a valve, the valve thermal insulating structure being capable of thermally insulating between a valve drive part and a fluid passing through a flow path, and capable of preventing gen...
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WO/2022/008209A1 |
The invention relates to a method for producing a gas curtain of purge gas in a slit valve tunnel of a device for treating a semiconductor wafer and to a slit valve tunnel. The method comprises conducting the purge gas to two ends of a c...
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WO/2021/256683A1 |
The present invention relates to an air-valve unit for a vacuum system. The valve unit includes a control unit that senses the pressure of an external exhaust space and outputs electronic valve on/off signals, and thus, may actively cont...
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WO/2021/230086A1 |
This steam valve includes a valve casing, a valve body, a valve stem, an actuator, a heat buffer member, a link mechanism, and a link base. The heat buffer member includes: a heat buffer plate separated toward a leading end side from the...
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WO/2021/223499A1 |
Disclosed in the present invention is an ultra-novel kitchen faucet structure, comprising a bend, a water spout, a fixed sleeve, a mounting base, and a switch valve. The fixed sleeve is arranged on the top end of the mounting base, and t...
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WO/2021/211536A1 |
An isolation valve assembly including a valve body having an inlet and an outlet. The isolation valve includes a seal plate disposed within an interior cavity of the valve body. The seal plate is movable between a first position allowing...
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WO/2021/203000A1 |
Disclosed is a wafer processing system, a dual gate system, and methods for operating these systems. The dual gate system may have a first gate, a second gate, a gate connector coupled to the first gate and to the second gate, and actuat...
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WO/2021/202611A1 |
Disclosed are a slit valve apparatus and a method for controlling a slit valve. The slit valve apparatus includes a slit valve assembly and a servo-control system in communication with the slit valve assembly. The slit valve assembly inc...
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WO/2021/187909A1 |
Disclosed is a fluid shut-off valve comprising: a valve housing including a fluid passage which is formed between a housing upper hole and a housing lower hole such that a fluid can be introduced and flowed therein, and an accommodation ...
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WO/2021/180699A1 |
A valve for a vacuum apparatus comprising a first housing element and a second housing element connected with the first housing element wherein an outer chamber is defined that the first housing element and the second housing element. Th...
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WO/2021/183346A1 |
A compact valve block for a chemical container wherein the coaxial valve block has a housing that can accommodate three valve control mechanisms thus allowing for quick and effective purging without the need for an additional external co...
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WO/2021/172746A1 |
A system for stagnating flow in an atomic layer deposition process by using a retention valve, according to one embodiment of the present invention, comprises: a deposition chamber having an inner space for receiving a substrate and a re...
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WO/2021/170312A1 |
The present invention relates to a valve (1) of a system for spraying a washing liquid, said valve (1) comprising: • - a valve body (3) enclosing a hydraulic cavity (5) which is configured to be fluidically connected to a hydraulic con...
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WO/2021/156934A1 |
This control valve comprises: a gate valve having a movable gate valve plate; and a butterfly valve that is provided to the gate valve plate, has a smaller diameter than a valve opening opened/closed by the gate valve plate, and can be f...
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WO/2021/115924A1 |
The invention relates to a vacuum valve or a vacuum door comprising a closure plate (7) for closing an opening (4, 29) in a wall (3, 32), wherein the opening (4, 29) has opposing first and second long edges (4a, 4b; 29a, 29b) and shorter...
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WO/2021/114470A1 |
Provided is a vacuum tank fresh-keeping refrigerating refrigerator, which comprises a vacuum pump, an air inlet valve, and an air outlet valve assembly (1); a vacuum pump electrical automatic control device assembly (2); a self-controlle...
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WO/2021/106893A1 |
An oil passage hole portion (61) internally forms a portion of an oil feed passage (101). A check valve portion (70) has a valve seat portion (71), which is a member that is press fitted into the oil passage hole portion (61), and allows...
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WO/2021/099405A1 |
The invention relates to a gas inlet valve (1) for the controlled inlet of a process gas into a vacuum process chamber, wherein the gas inlet valve has: a gas passage unit (2) with a gas input (21), a gas output (22) and an internal volu...
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WO/2021/101209A1 |
The present invention relates to dual bellows for slit valves for semiconductor processes and a slit valve leak monitoring system using same. According to an embodiment of the present invention, disclosed are dual bellows for slit valves...
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WO/2021/091075A1 |
The present invention relates to a vacuum container cover and a vacuum container including same. The vacuum container cover comprises: a cover unit having a valve hole; a valve unit arranged in the valve hole and maintaining a vacuum pre...
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WO/2021/083669A1 |
A vacuum valve comprises a valve body (1), a closure member (4), at least one valve rod (9) which supports the closure member (4), at least one guide piece (15a, 15b) by which the at least one valve rod (9) is guided so as to be movable ...
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WO/2021/073838A1 |
An arrangement with a valve (1) which has a valve housing (2) and a closure member (5) which is mounted such that it can be moved in an interior space (3) of the valve housing (2) to and fro between a closed position and an open position...
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WO/2021/074270A1 |
A vacuum adjustment device (10) for an active element (19), which can move in a process atmosphere area (P) and has a clutch (18) and a drive unit which has an electric motor (12) and which interacts with the clutch (18) in such a way th...
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WO/2021/065090A1 |
Provided is a high-pressure fluid discharge device that can adapt to large flow rates while being small in size. The discharge device comprises a diaphragm valve body (14) that cooperates with a valve seat (24a) provided to a body (12) t...
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WO/2021/059989A1 |
In order to adjust the flow of a fluid with high precision, a flow adjustment valve (150) is provided with: a flow path (151) that has an opening (152) formed at one end thereof, and through which the fluid flows; a rising/lowering valve...
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WO/2021/043528A1 |
The invention relates to a vacuum valve (1) for loading and/or unloading a vacuum chamber (2), wherein the vacuum valve (1) has a closing plate (3), the closing plate (3) being pressed against a valve seat (4) when in a closed position a...
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WO/2021/034614A1 |
Embodiments of symmetric flow valves for use in a substrate processing chamber are provided herein. In some embodiments, a symmetric flow valve includes a valve body having sidewalls, a bottom plate, and a top plate that together define ...
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WO/2021/019926A1 |
A cleaning device (4) is equipped with a cleaning mechanism (5) that removes foreign matter in a subject location in a flow passage, and a determination device (6) that determines an operation of the cleaning mechanism (5). The cleaning ...
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WO/2021/014618A1 |
An EGR valve device (100) is provided with: a spring chamber (3) that is formed in a housing (1), disposed between an actuator (11) and an exhaust flow passage (2), and is in communication with the exhaust flow passage (2); and a dustpro...
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WO/2021/000629A1 |
An anti-surge device of a gas pressure regulator. The anti-surge device comprises: a first damper (7) and a second damper (8). The first damper (7) is transversely arranged, a gas inlet end of the first damper (7) is configured to be com...
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WO/2020/250841A1 |
A vacuum valve characterized by being equipped with a valve plate and an actuator 12 for driving the valve plate, the actuator 12 being equipped with: a shaft 16 coupled to the valve plate; drive units arranged side by side in the radial...
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WO/2020/239625A1 |
A fluid control device (100) includes a structure (120) defining a valve cavity, a first fluid port (135), a second fluid port (140), and a third fluid port (145) configured to be fluidly coupled to a hermetic interior (105) of a body; a...
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WO/2020/235504A1 |
[Problem] The purpose of the present invention is to provide a valve device and a gas consumption unit which can be attached to a storage container to restrict the passage of fluid, the valve device and the gas consumption unit being sma...
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WO/2020/225844A1 |
A double-sided sealing gate valve, wherein vibration during operation is reduced and the stable sealing performance when the valve is closed by a valve plate is achieved. This gate valve (1) according to the present invention, which open...
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WO/2020/222420A1 |
The present invention relates to a valve for a cryogenic liquid gas and, more specifically, to a valve provided in a use line (a gas use line and a liquid use line) of a storage tank for liquid helium or liquid hydrogen which is a cryoge...
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WO/2020/213231A1 |
A float check valve 1 comprises: a cylindrical holding member 10 that is fixed in a vertically extending manner in a portion where the float check valve 1 is to be installed and has an interior through which liquid circulates; and a valv...
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WO/2020/180103A1 |
The present invention is configured such that, when a fluid discharge part is open, a shutter member rotates and is positioned at the lower part of a sealing member so as to cover an exposed part of a sealing ring, and the present invent...
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WO/2020/165248A1 |
The invention relates to a vacuum valve (10) for closing, in a substantially gas-tight manner, an opening defining an opening axis, said vacuum valve having a closure member (14) with a closure side and a coupling unit arranged on a rear...
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