Title:
VACUUM VALVE
Document Type and Number:
WIPO Patent Application WO/2020/180103
Kind Code:
A1
Abstract:
The present invention is configured such that, when a fluid discharge part is open, a shutter member rotates and is positioned at the lower part of a sealing member so as to cover an exposed part of a sealing ring, and the present invention thereby has the benefit of securing reliability for sealing of a vacuum valve by preventing damage to the sealing ring due to a processing by-product such as a particle even if the sealing ring is exposed to a fluid transport part as the fluid discharge part is open for an air cleaning operation.
Inventors:
JEONG GYU JAE (KR)
JIN JI HYE (KR)
JIN JI HYE (KR)
Application Number:
PCT/KR2020/003050
Publication Date:
September 10, 2020
Filing Date:
March 04, 2020
Export Citation:
Assignee:
PRESYS CO LTD (KR)
International Classes:
F16K3/314; F16K3/02; F16K27/04; F16K51/02; H01L21/02
Foreign References:
| KR101806331B1 | 2017-12-08 | |||
| KR970030255A | 1997-06-26 | |||
| JP2008051171A | 2008-03-06 | |||
| JP4435799B2 | 2010-03-24 | |||
| US4065097A | 1977-12-27 |
Attorney, Agent or Firm:
STYP PATENT LAW FIRM (KR)
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