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JP2024046255A |
An object of the present invention is to provide a rotary dresser that has little resistance during dressing, has little variation in cutting quality, and can perform stable dressing. [Solution] A dress having an annular backing layer 30...
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JP7460334B2 |
A method for continuous generating grinding of at least two gear workpieces with a topologically modified grinding worm comprising a topologically modified worm region to grind tooth flanks which are topologically modified on the gear wo...
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JP2024043781A |
An object of the present invention is to suppress adhesion of polishing debris to the outer peripheral portion of a chuck table. In a polishing process, an outer peripheral portion of a wafer 100 is pressed against a polishing pad 77 by ...
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JP7458868B2 |
To provide a holding jig which enables a dresser board to be suctioned and held on a holding table when both surfaces of the dresser board are cut, and to provide a usage of the holding jig.A holding jig of a dresser board for holding th...
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JP7451948B2 |
To provide a processing quality prediction system that can predict a state of an affected layer generated in a work-piece, with higher accuracy.A processing quality prediction system 1 comprises: a grinder main body 11 that performs grin...
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JP2024036739A |
An object of the present invention is to prevent a holding part of a holding mechanism (pendulum type clamp) provided on a spinner table from piercing a dressing tool that cannot be penetrated. [Solution] The spinner table has supports e...
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JP2024035879A |
The present invention provides a method for cutting a workpiece that can improve processing efficiency. [Solution] A method for cutting a workpiece by cutting the workpiece with a cutting blade, the method includes a first fixing step of...
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JP7450460B2 |
To provide a wafer processing method that can thin a wafer while suppressing damage to the outer circumference of the wafer.A wafer processing method includes: a blade preparation step 1001 of preparing a cutting blade whose outer periph...
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JP7450134B1 |
The rotary dresser includes a base metal 103 having an outer peripheral surface and an abrasive layer 101 provided on the outer peripheral surface of the base metal 103. The abrasive grain layer 101 has a bonding material 203 provided on...
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JP2024033597A |
An object of the present invention is to determine the usage status of an abrasive surface in a short time and with high accuracy. An abrasive surface determination device 30 includes a storage section 44, an output section 60, a class i...
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JP2024511030A |
The diamond disk includes a shank base, a bonding layer formed on the surface of the shank base, and a plurality of boron-doped diamonds arranged to be exposed to the bonding layer, and at least one of the plurality of boron-doped diamon...
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JP7446722B2 |
Provided is a grinding apparatus which is able to allow a user to replace a grinding wheel in a timely manner, and to perform dressing or the like to regenerate a surface of a grinding stone. According to the present invention, the grind...
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JP2024029312A |
An object of the present invention is to reduce the amount of dust remaining on a support table of a dressing unit. [Solution] A polishing device that performs dry polishing on a workpiece, which includes a holding table that holds the w...
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JP7442999B2 |
To provide a grinding unit that can rotate a grinding grindstone around a unique rotation axis different from a rotation axis of a tool spindle and a complex machining machine equipped with the same.The complex machining machine comprise...
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JP2024029210A |
The present invention is to automatically, quickly, repeatably, and accurately move a workpiece between tools without any manual intervention, such as grinding the inner diameter, outer diameter, and ribs of tapered roller bearing cones....
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JP7441376B2 |
Provided is a novel dresser capable of imparting high flatness to a polishing pad. A dresser for a surface of a polishing pad is provided, comprising a circular dressing surface having a diameter DCD and facing the pad surface, and pel...
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JP7441381B1 |
The rotary dresser is a rotary dresser having a superabrasive grain layer in which superabrasive grains are combined into one layer by a plating layer on a base metal, and the superabrasive grains are first superabrasive grains having a ...
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JP2024508936A |
Monitoring the operation of the polishing system involves acquiring a time-based series of reference images of components of the polishing system that perform operations during test operations of the polishing system, and equivalent imag...
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JP2024508534A |
A polishing assembly includes a chemical mechanical polishing system, a fluid source, and a fluid delivery conduit that conveys fluid from the fluid source into the chemical mechanical polishing system. A chemical mechanical polishing sy...
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JP2024024161A |
An object of the present invention is to provide a method for polishing one side of a wafer that can obtain a wafer with a desired shape. A method for polishing one side of a wafer is to polish the wafer by pressing the wafer held by a p...
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JP7437473B2 |
The present disclosure relates to a method for refreshing a polishing pad, and, through increasing a useful life of a polishing pad used in a polishing process, is capable of reducing the amount of discarded polishing pad, and significan...
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JP2024024162A |
An object of the present invention is to provide a method for polishing one side of a wafer that can obtain a wafer with a desired shape. A method for polishing one side of a wafer is to polish the wafer by pressing the wafer held by a p...
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JP7431645B2 |
To provide a control method for dress grinding device for a screw grinder.A dress grinding device has coarse dress means to perform coarse dress to a target, and finish dress means which performs finish dress with a constant cut thicknes...
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JP2024020834A |
The present invention provides a method for shaping a cutting blade that can suppress the length of time required for shaping the cutting blade. [Solution] When the maximum value of the current supplied to a predetermined motor that chan...
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JP7430984B2 |
Method for the grinding of a gear wheel workpiece using a dressable worm grinding wheel, wherein the worm grinding wheel is rotationally driven about a tool axis of rotation and the gear wheel workpiece is rotationally driven about a wor...
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JP7430450B2 |
The present invention provides a dresser board capable of preventing scattering of particles. The dresser board for dressing a cutting blade of the present invention comprises: a dressing layer comprising abrasive grains fixed by a bindi...
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JP7430452B2 |
A cutting apparatus cuts a workpiece by a cutting blade. The cutting apparatus includes a mount flange on which the cutting blade is mounted and a replacement apparatus that replaces the cutting blade mounted on the mount flange with the...
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JP2024016543A |
An object of the present invention is to reduce the amount of burrs that are formed to protrude from the side surface of a workpiece. [Solution] A rotating cutting blade is relatively moved in a predetermined direction from one end of a ...
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JP2024014560A |
The present invention proposes a polishing pad dressing method that can dress a polishing pad more uniformly even when the surface of a rotating surface plate is curved. [Solution] Dressing the polishing pad 100 by pressing a grindstone ...
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JP2024014487A |
The present invention provides a polishing pad surface quality determination method and surface quality determination system that can appropriately determine the surface quality of a polishing pad. [Solution] In the surface texture deter...
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JP2024503978A |
Provided herein are advanced substrate polishing methods that use machine learning artificial intelligence (AI) algorithms or software applications generated using AI to control one or more aspects of a polishing process. . An AI algorit...
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JP7423139B2 |
A method and a system are provided for automatically dressing a grinding wheel used to grind workpieces. A workpiece is scanned to determine dimensions of the workpiece. A computer-readable dimensions datafile is generated containing the...
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JP7422424B2 |
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JP2024011312A |
[Problem] To suppress wear on the grinding wheel while maintaining machining quality. [Solution] Based on the load current value of a spindle motor 73, the load value of a grinding wheel such as a grinding wheel 77 or a chamfering wheel,...
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JP2024010709A |
An object of the present invention is to provide a dressing method capable of dressing a plurality of grinding wheels in just the right amount. [Solution] A dressing step for dressing a plurality of grinding wheels is performed while mea...
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JP7421460B2 |
The present invention relates to a technique of determining a time to replace a polishing pad used in a polishing apparatus for polishing a workpiece, such as wafer, substrate, or panel. A polishing apparatus (1) includes: a polishing ta...
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JP7420530B2 |
To provide a dressing surface evaluation apparatus, a dressing device, and a grinding device that can quantitatively evaluate the dressing surface state of a grinding wheel.An evaluation value representing a dressing surface state calcul...
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JP7417988B2 |
To provide a grindstone that can increase grinding amounts while suppressing deterioration of grinding capability, a grindstone unit, and a machine tool.A grindstone 10 for grinding a work-piece W comprises a plurality of pillar parts 42...
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JP2024008991A |
The present invention provides a grinding device that accurately measures the dressing amount of a grinding wheel. [Solution] A grinding device 1 includes a grinding wheel spindle 22 that is provided with a grinding wheel 21 and rotates ...
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JP7413110B2 |
To provide a truing completion verification device that can perform truing by which a service life of a grinding stone is not spoiled as much as possible.A truing completion verification device is provided with a truing completion verifi...
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JP2024002285A |
The present invention provides a surface texture estimating device that improves surface texture estimation accuracy by alleviating the influence of noise due to an unstable gain frequency band of natural vibration characteristics. [Solu...
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JP2024001517A |
[Problem] In addition to reducing the time and cost required to create trueers and making the quality uniform, it is possible to improve the transfer rate of trueing, workability, and the accuracy of the grooves formed on trueing, and in...
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JP2024001803A |
An object of the present invention is to suppress deterioration in processing quality of a workpiece. [Solution] A cutting device 1 includes a holding table 10 that holds a workpiece 200, a cutting unit 20 having a spindle 23 on which a ...
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JP2023181618A |
To provide a dressing method that can efficiently execute dressing while avoiding a cutting blade from being damaged, in flatly forming an end face of an outer periphery of the cutting blade.A dressing method, which uses a cutting device...
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JP2023552716A |
In a method of machining a workpiece in a tooth grinding machine having a grinding tool 320 with ceramic bonded abrasive grains made of superabrasive material, the grinding tool is first dressed. The dressed grinding tool is then conditi...
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JP7398946B2 |
To provide a polishing device which can recover a larger amount of powder dust (polishing waste) accumulating around a dress part.A polishing device 1 includes: a chuck table 13; a polishing mechanism 2 having a polishing tool 23, a spin...
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JP7398096B2 |
To perform dressing with a device which can perform truing.There is provided a grinding surface correction method for a rotary grind stone for correcting a grinding surface of a rotary grind stone whose peripheral surface is the grinding...
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JP2023178295A |
To provide a polishing apparatus for consumable part monitoring.A polishing apparatus includes a polishing station to hold a polishing pad, a carrier head to hold a substrate in contact with the polishing pad at the polishing station, a ...
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JP7394712B2 |
A cutting device is equipped with a spindle part, a control part, and a measuring device. The spindle part can adjust the height position, and the blade is installed therein. The measuring device is configured to measure the height posit...
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JP2023170074A |
To provide a vertical rotation type ELID processing device and the like which can properly perform dressing of a blade with an electrolyte even in a case where the rotational speed of the blade is fast.An ELID processing device comprises...
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