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WO/1999/062089A1 |
The inventive micro-mechanical electrostatic relay has a base substrate with a base electrode and at least two base contact pieces, and an armature substrate with an etched-out, rib-shaped armature. Said armature is suspended by flexible...
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WO/1999/043013A1 |
The present invention relates to a micro-mechanical electrostatic relay comprising at least one base substrate (1) with a flat base electrode, as well as a rotor blade (21) which is stamped from the rotor substrate (2) and has a flat rot...
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WO/1999/034383A1 |
A relay device built using MEMS technology and having a semiconductor wafer base with a surface depression having a first electrically conductive surface pattern. A lower diaphragm is moveably positioned above the depression for contact ...
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WO/1999/026333A2 |
A microelectro-mechanical device which includes a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined di...
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WO/1999/021204A1 |
A movable substrate (20) is supported by a base (10) through a first elastic supporting section (22) and a traveling contact (12) is supported by the movable substrate (20) through a second elastic supporting section (23) having a moduli...
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WO/1999/017322A1 |
An electrostatic microrelay which has desired operating speed at the time of the initial operation and the reset operation, is ensured to have a desired contact pressure, and driven by a low voltage. The microrelay opens/closes an electr...
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WO/1999/010907A1 |
The micromechanical relay has a base substrate (81) on which a flexible induction tongue (41) with a moveable contact (8) is structured in such a way that it is elastically curved away from the substrate in non-operational mode. A fixed ...
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WO/1998/021734A1 |
The invention relates to a method for manufacturing a micromechanical relay comprising the preparation of a substrate (10) having a fixed conductive electrode (18) in the substrate (10) or on the same. A sacrificial layer (26) and a cond...
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WO/1998/009312A1 |
An extremely small micro-relay having such a mechanical contact mechanism that it becomes smaller in resistance when the contact is turned on and has an excellent vibration resistance, frequency characteristic, and insultating property i...
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WO/1997/029538A1 |
The invention concerns a bistable electrostatic actuator with pneumatic or liquid coupling. The electrostatic membrane actuator has enclosed metallic electrodes (21, 22; 23). It can be used for a microvalve or a micropump. Said actuator ...
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WO/1997/018574A1 |
An electrical switch has an evacuated housing (1) with input and output terminals (2 and 3) each connected to a respective group of metal tracks (25 and 28) extending parallel and insulated from one another. A second silicon plate (31) i...
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WO/1996/038850A1 |
A controllable microswitch comprises a closed cavity having a plurality of contact electrodes, a movable switch body capable of making and breaking an electrical connection between the contact electrodes, and a plurality of control elect...
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WO/1995/001624A1 |
A spatial light modulator formed of a moveable electrode (30) which is disposed opposite a fixed electrode (12) and is biased to roll in a preferred direction upon application of an electric field across the electrodes to produce a light...
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WO/1994/027308A1 |
A bi-stable memory element (1) comprises a base contact (3), and a bridging contact (8), both made from an electrically conductive material. The bridging contact (8) is dimensioned so as to have two stable positions, in one of which the ...
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WO/1994/019819A1 |
A micromechanical relay has a tongue-shaped armature (53) etched out of an armature substrate (52). The armature (53) is elastically linked to the armature substrate and forms an electrostatic actuator together with the base electrode (5...
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WO/1994/018688A1 |
A bridging member (18) extending across a cavity (16) in a semiconductor substrate (12) (e.g. polycrystalline silicon) has successive layers - a masking layer (20), an electrically conductive layer (22) (e.g. polysilicon) and an insulati...
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WO/1993/021657A1 |
A precision microactuator (30) fabricated from a single crystal of silicon for mechanically moving microstructures (10) having a beam (12) with a longitudinal axis and a first fixed end (14) and a second remote end, there being at least ...
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WO/1993/017440A1 |
The invention relates to a process for making an oblique-sided recess in a substrate in which areas of the substrate corresponding to the recess to be made are covered with an etching mask which is not attacked by an isotropic etching fl...
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WO/1993/003385A1 |
The proposal is for an acceleration sensor intended in particular to detect a motor vehicle collision. The sensor has a spring-mass system (1) with a stable initial position (4) and a stable deflection position (5). On acceleration in th...
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WO/1992/022763A1 |
A miniature actuating device (1), is disclosed, with a carrier (13), a diaphragm (11), a hollow space (15) being formed between the carrier (13) and the diaphragm (11) and an insulating layer (12) being arranged between them, and with tw...
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WO/1988/007697A1 |
A micromechanical cantilever beam (1) for use in an optical switch or other radiation deflector assembly includes a beam portion (2) comprising two parallel arms (5, 6) hinged at one end to a sulpporting substrate (4) and at the other en...
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WO/1986/003879A1 |
Arrays of electrostatic elements arranged in columns and rows are used for switching purposes and for memory devices. Electrostatically attracted members, for each element, when actuated, complete a capacitance device to render that elem...
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WO/1986/001626A1 |
Electrostatically actuated binary device arrays have electrostatically attractable flaps or shutters to change state. Plural parallel shutters may be used for each device. Plural electrode regions permit X, Y addressing of a device and f...
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JP2024518353A |
Various arrangements of microelectromechanical (MEMS) die and controller die in a vertically stacked structure are disclosed. The orientation of the MEMS die and controller die changes in various arrangements. In one embodiment, the back...
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JP2024512349A |
A microelectromechanical switching device (1) has been proposed. It is one multilayer comprising - a first layer (110) functioning as a support layer, an electrically insulating second layer (120) and a third layer (130) configured as a ...
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JP7446248B2 |
According to one embodiment, a MEMS element includes a first member, and an element part. The element part includes a first fixed electrode fixed to the first member, and a first movable electrode facing the first fixed electrode, a firs...
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JP7444745B2 |
According to one embodiment, a MEMS element includes a first member, and an element part. The element part includes a first fixed electrode fixed to the first member, a first movable electrode facing the first fixed electrode, a first co...
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JP7388667B2 |
Provided is an in-plane sliding parallel capacitive radio frequency, RF, switch based on a superlubric structure. The RF switch includes a substrate, first to third drive components, an insulating layer, and a sliding component. Where a ...
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JP2023532851A |
An electronic module comprising at least one MEMS switch with a substrate and at least one semiconductor component, wherein the at least one semiconductor component is formed by the substrate and connected to the MEMS switch.
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JP2023519328A |
[Theme] A method for fabricating and packaging an ohmic micro-electro-mechanical system (MEMS) switch device is provided. [Solution] A method of fabricating and packaging an ohmic micro-electro-mechanical system (MEMS) switch device incl...
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JP2023050951A |
To provide a switching regulator, a power supply circuit, and a method capable of further reducing power consumption.A switching regulator according to one aspect of the present disclosure includes: a fixed electrode; a movable electrode...
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JP7193670B1 |
A MEMS switch is provided. A MEMS switch includes a case, a switch unit, a first working electrode, a first contact, a second working electrode, a second contact, a third working electrode and a fourth working electrode, wherein the firs...
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JP7162305B2 |
An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supp...
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JP7130391B2 |
A microelectromechanical switch having improved isolation and insertion loss characteristics and reduced liability for stiction. The switch includes a signal line having an input port and an output port between first and second ground pl...
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JP7018904B2 |
An electrical system includes an operation MEMS switch operable in on and off states to enable and disable current flow to a load and a fault interruption MEMS switch positioned in series with the operation MEMS switch. The fault interru...
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JP6998379B2 |
Disclosed are systems and methods of operation for capacitive radio frequency micro-electromechanical switches, such as CMUT cells for use in an ultrasound system. An RFMEMS may include substrate, a first electrode connected to the subst...
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JP6944997B2 |
A micro-electromechanical-system (MEMS) switch (1) is formed in a substrate (2) and includes a first RF signal line (3) and a second RF signal line (4), a deformable membrane (5), an activator (7) configured to deform the membrane (5), a...
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JP6917370B2 |
The present invention generally relates to a mechanism for making the anchor of the MEMS switch more robust for current handling. The disclosure includes a modified leg and anchor design that allows for larger currents to be handled by t...
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JP6873127B2 |
The present disclosure generally relates to the combination of MEMS intrinsic technology with specifically designed solid state ESD protection circuits in state of the art solid state technology for RF applications. Using ESD protection ...
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JP6868006B2 |
A radio frequency (RF) microelectromechanical system (MEMS) package includes a first mounting substrate, a signal line formed on a top surface of the first mounting substrate, the signal line comprising a MEMS device selectively electric...
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JP6864684B2 |
The present disclosure generally relates to a MEMS device for reducing ESD. A contacting switch is used to ensure that there is a closed electrical contact between two electrodes even if there is no applied bias voltage.
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JP6858186B2 |
The present disclosure generally relates to a mechanism for making a MEMS switch that can switch large electrical powers. Extra landing electrodes are employed that provide added electrical contact along the MEMS device so that when in c...
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JP6858187B2 |
A MEMS switch contains an RF electrode 102, pull-down electrodes 104 and anchor electrodes 108 located on a substrate 101. A plurality of islands 226 are provided in the pull-down electrode and electrically isolated therefrom. On top of ...
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JP6854769B2 |
A MEMS switch includes a substrate and a switch structure formed on the substrate, with the switch structure further including a conductive contact formed on the substrate, a self-compensating anchor structure coupled to the substrate, a...
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JP6853248B2 |
The present invention generally relates to a mechanism for making a MEMS switch that has a robust RF-contact by avoiding currents to run through a thin sidewall in a via from the RF-contact to the underlying RF-electrode.
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JP6820913B2 |
A system and method for a micro-electrical-mechanical system (MEMS) device including a substrate and a free-standing and suspended electroplated metal MEMS structure formed on the substrate. The free-standing and suspended electroplated ...
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JP6821676B2 |
A switching system includes a MEMS switching circuit having a MEMS switch and a driver circuit. An auxiliary circuit is coupled in parallel with the MEMS switching circuit, the auxiliary circuit comprising first and second connections th...
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JP6781048B2 |
A system includes a plurality of micro-electromechanical switches including a plurality of gates, coupled to each other. Each micro-electromechanical switch includes a beam electrode disposed on a substrate. A beam includes an anchor por...
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JP2020071940A |
To provide a switch that can accurately perform switching between transmission and cut-off of a signal, a method for manufacturing a switch, a force sensor, and a robot.A switch has a base that has a concave part; a conductive movable pa...
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JP6601071B2 |
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