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JP5172360B2 |
A gating voltage control system is provided for electrostatically actuating a micro-electromechanical systems (MEMS) device, e.g., a MEMS switch (14). The device may comprise an electrostatically responsive actuator movable through a gap...
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JP5152062B2 |
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JP5150692B2 |
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JP5138144B2 |
A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The ...
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JP5130291B2 |
When a high power signal is input to an electromechanical device, electrostatic force can automatically and unintentionally drive the movable electrode. A high reliability electromechanical device that prevents this is achieved. The elec...
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JP5131298B2 |
This invention forms a contact having a large opposing area using a contact material of high hardness. An end face in the moving direction of a movable contact portion 34 and an end ace of a fixed contact portion 33 face each other. The ...
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JP5123198B2 |
A MEMS device is electrically actuated with a voltage placed across a first electrode (702) and a moveable material (714). The device may be maintained in an actuated state by latch electrodes (730a, 730b) that are separate from the firs...
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JP5105985B2 |
An electric component includes a substrate, a function element provided on the substrate, a first sealing body provided on the substrate to cover the function element at a certain distance, the first sealing body including multiple apert...
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JP5110781B2 |
A substantially straight beam in an unbuckled state is compressed to cause the beam to buckle using an adjustable compressor. The adjustable compressor applies force to one or both ends of the beam and limits compression on the beam to a...
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JP5098769B2 |
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JP5098770B2 |
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JP5094121B2 |
An RF MEMS device comprising one or more free-standing thin films configured for motion in response to actuation or stimulation, the one or more thin films comprising an alloy of aluminum and magnesium, and optionally one or more further...
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JP5083977B2 |
An electromechanical element includes a first electrode which is provided on a substrate, and a second electrode and a third electrode which are provided via a gap with respect to the first electrode. The first electrode contacts with th...
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JP5081038B2 |
The MEMS switch comprises a substrate with signal-lines having fixed-contacts, a movable-plate with a movable-contact, a flexible support-member supporting the movable-plate, a static-actuator and a piezoelectric-actuator configured to c...
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JP2012216298A |
To provide a micro relay capable of stably supporting a movable plate without partial contact of a contact point.Two fulcrum parts 22 supporting a movable plate 12 on a substrate 30 are provided between the movable plate 12 and the subst...
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JP2012212579A |
To provide a switch capable of restraining ripples in a usage frequency bandwidth.A base substrate 1 is provided with an input side transmission line 11 and first and second output side transmission lines 12 and 13 that are strip conduct...
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JP2012212583A |
To provide a switch capable of improving isolation when it is turned off, and a relay device including the same.A line conductor 11 comprising a connected strip conductor and forming a signal transmission path between an input terminal 1...
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JP5054936B2 |
A memory element which has high affinity with a conventional semiconductor process, which has a switching function of completely interrupting electric conduction paths by in a mechanical manner, and in which nonvolatile information recor...
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JP2012196727A |
To provide a microelectromechanical system (MEMS) element in which an upper electrode is movable with a low voltage to operate on and off actions, and also such a shape change of a device as affecting on the operating voltage does not oc...
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JP5049656B2 |
A manufacturing method for a hollow sealing structure, includes, a process for filling a recessed portion in a principal surface of a substrate with a first sacrificial layer, a process for forming a functional element portion on the pri...
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JP5050022B2 |
According to one embodiment, a MEMS device includes an electrode on a substrate, a movable structure which is supported in midair above the electrode by first and second anchor portions on the substrate, and moves toward the electrode, a...
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JP2012193104A |
To provide an aggregate comprising a plurality of CNTs( Carbon Nano Tubes) with anisotropy and shape restorability and formable into a desired shape at a desired position, and a two-terminal switch equipped with the same.The carbon nanot...
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JP5037804B2 |
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JP5033032B2 |
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JP5031573B2 |
A micro-electromechanical device has a substrate (10), a movable element, movable towards the substrate by electrostatic forces on electrodes, facing surfaces of the movable element and the substrate being shaped such that one or more ve...
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JP5023523B2 |
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JP2012161855A |
To provide an MEMS device that reduces influence of static electricity causing a characteristic abnormality of a movable part.An electrostatic capacitance type MEMS device includes: a semiconductor element composed of a body part 1, a fi...
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JP4995719B2 |
The invention concerns an arrangement for controlling a non-volatile memory arrangement for a circuit comprising:a micromechanical element coupled to a substrate; the micromechanical element being responsive to deflection means arranged ...
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JP4995717B2 |
A nanotube device is disclosed which includes a nanotube with a longitudinal and a lateral extension, a structure for supporting at least a first part of the nanotube, and a first device for exerting a force upon the nanotube in a first ...
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JP4970150B2 |
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JP4966448B2 |
A micro-mechanical element includes a discrete switching element and a switching means for applying force to the switching element to move the switching element between two stable positions.
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JP2012119160A |
To provide an electrostatic drive switch, or the like, which can enhance the life and reliability of a power supply system.The electrostatic drive switch provided in a transmission body 10A to supply power to a reception body 20A switche...
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JP4956229B2 |
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JP4945204B2 |
An actuator of the present invention includes a moving part, and a driving electrode which is comprised of electrode parts electrically isolated from each other and drives the moving part. A drive voltage is applied selectively to some o...
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JP4932506B2 |
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JP2012086315A |
To form a contact electrode in a movable electrode structure in a stable state.A manufacturing method for a minute movable structure includes the following configuration. A contact forming region above a second electrode 103 is formed wi...
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JP4927701B2 |
A high-frequency MEMS switch comprises a signal conductor which is arranged on a substrate and an oblong switching element which has a bent elastic bending area and is fastened on the substrate in a cantilevered manner. An electrode arra...
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JP4919819B2 |
A drive control method for a micro machine device is provided. The micro machine device is made up of first and second electrodes opposed to each other and a dielectric layer disposed between them. The drive control method includes the s...
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JP4887465B2 |
A MEMS switch in which contact force sufficient to make a contact having low contact resistance is maintained after contact-formation to maintain low contact resistance at the contact where the signal is transmitted in an “on” state....
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JP4887466B2 |
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JP2012038661A |
To provide a structure of an MEMS switch capable of reducing loss in a switch, and a method of manufacturing the same.A contact metal thin film 21 is disposed only in a portion opposed to a second wiring 3. Hence, a distance that a high ...
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JP4880878B2 |
The present invention is directed to a structure comprised of alternating layers of metal and sacrificial material built up using standard CMOS processing techniques, a process for building such a structure, a process for fabricating dev...
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JP4879760B2 |
A micro-switching device includes a fixing portion, a movable portion, a first electrode with first and second contacts, a second electrode with a third contact contacting the first contact, and a third electrode with a fourth contact op...
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JP4867007B2 |
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JP2012014204A |
To provide a suitable backplane for an electro-optical display device.The backplane for an electro-optic display device includes a pixel electrode (104), a voltage supply line (C) arranged to supply a voltage to the pixel electrode (104)...
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JP4855233B2 |
A micro-switching device includes a base substrate, a fixing member on the substrate, a movable part having an end fixed to the fixing member and extending along the substrate, a movable contact electrode provided on the movable part and...
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JP4846815B2 |
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JP4842041B2 |
A switch includes a movable portion, a first electrode and a second electrode. The movable portion is provided on a substrate and moves with respect to the substrate. The first electrode is provided on the movable portion. The second ele...
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JP4820816B2 |
A microelectromechanical element of a hydrophobic surface structure with a long life and high reliability and an electromechanical switch using the microelectromechanical element are provided. The surface of an electrode has a composite ...
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JP4816762B2 |
A structure of a spring has a supporting member, an actuating member that is rotatably supported to the supporting member by a first supporting axis at a portion near a center, and a plurality of interlocking members that are each provid...
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