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JP4363438B2 |
Micro-electromechanical switch comprising a layered structure, comprising an actuator electrode (11) corresponding to a first conductive layer, at least one contact electrode (21, 22) corresponding to a second conductive layer, and a dis...
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JP4355717B2 |
A vertical comb actuator radio frequency (RF) micro-electro-mechanical system (MEMS) switch. The RF MEMS switch includes a substrate; first and second signal lines spaced at a predetermined interval from each other and deposited on an up...
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JP2009252463A |
To provide a miniature electric-mechanical switch which improves a contact reliability between a movable contact portion and a stationary contact portion.The miniature electric-mechanical switch includes a stationary contact portion 2 fo...
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JP2009252516A |
To provide an MEMS switch in which a parasitic capacitance between a first contact electrode and a second contact electrode are reduced and a driving voltage is lowered and moreover a contact reliability is improved.The MEMS switch inclu...
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JP2009252598A |
To provide an MEMS switch in which a reduction of a transfer loss is attained and moreover a contact pressure is enlarged as well while isolation characteristics are improved.The MEMS switch includes a pair of signal lines 34, 34 which a...
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JP2009252378A |
To provide an MEMS switch which reduces a parasitic capacitance between a movable contact and both of stationary contacts.The MEMS switch includes a base board 1, a pair of signal lines 34, 34 which are formed on the one surface side of ...
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JP4351634B2 |
A conductor (7) which is provided between two zones is capable of moving freely through the intermediate space (25) based on the voltage applied between the capacitive plates (3,9). The conductor closes the electric circuit by butting ag...
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JP2009245876A |
To provide an MEMS switch having improved opening and closing characteristics of contacts.This MEMS switch 1 includes a rotor 4 rotating with a rotary pole 3 erected on a substrate 2 as a center. The rotor 4 has a plurality of support ar...
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JP4348390B2 |
A switch circuit includes: a first input and output terminal; a first inductor connected with the first input and output terminal; a capacitor connected with the first inductor; a second input and output terminal connected with the capac...
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JP2009238547A |
To provide a MEMS (micro electro mechanical system) switch which reduces a parasitic capacitance between a movable contact and both fixed contacts and secures a desired contact pressure while realizing a low power consumption.The MEMS sw...
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JP2009238546A |
To provide a micro electric machine switch capable of contacting a fixed contact and a movable contact with an equal contact pressure.The micro electric machine switch is provided with a movable contact support table 1 having a table par...
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JP2009226498A |
To provide a micromechanical apparatus can reduce noise of an output signal by suppressing vibration of a micromachine; and a manufacturing method of the micromechanical apparatus.This micromechanical apparatus 1 is provided with: a subs...
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JP2009226497A |
To provide a micromechanical apparatus can reduce noise of an output signal by suppressing vibration of a micromachine; and a manufacturing method of the micromechanical apparatus.This micromechanical apparatus 1 is provided with: a subs...
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JP2009226501A |
To provide a micromechanical apparatus can reduce noise of an output signal by constituting it to easily settle vibration of a micromachine.This micromechanical apparatus 1 is provided with: a substrate 11 having a signal wire 15 on its ...
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JP4332542B2 |
A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one sign...
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JPWO2007125969A1 |
The micromachine switch of the present invention includes a first control signal for electrically connecting the signal electrodes through which the signal should pass and a second control signal for disconnecting the electrical connecti...
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JP2009201317A |
To simply and accurately determine an electrostatic actuator state and restore the state to a normal operating state promptly when the occurrence of charging and the like is determined.The hold voltage Vhold is applied to an upper electr...
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JP2009188402A |
To provide an airtight packaging device and a method for carrying out airtight packaging, at least for one packaging device at the packaging level of a wafer.A plurality of devices are hermetically packaged at the packaging level of the ...
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JP2009178815A |
To provide a micromachine apparatus capable of reducing the noise of an output signal by suppressing the vibration of the micromachine, and a method for manufacturing the same.The micromachine apparatus 1 includes: substrates 11, 12; a M...
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JP2009178816A |
To provide a micromachine apparatus capable of reducing the noise of an output signal by suppressing the vibration of the micromachine, and a method for manufacturing the same.The micromachine apparatus 1 includes: substrates 11, 12 moun...
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JP4313210B2 |
The device has a base element and a switch element with auxiliary electrodes in the lateral direction. A voltage is applied to electrodes and the auxiliary electrodes to open switch contacts so the electrodes and auxiliary electrodes hav...
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JP4305293B2 |
The present invention realizes a highly reliable relay with a longer service life, no moving parts and no insufficient contact, being composed of a fluid path formed on an insulating member, a cell or cells formed at one end or both ends...
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JP4299788B2 |
A micro-electro mechanical (MEM) switch capable of inductively coupling and decoupling electrical signals is described. The inductive MEM switch consists of a first plurality of coils on a movable platform and a second plurality of coils...
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JP4300865B2 |
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JP4294590B2 |
The invention relates to an electromechanical switching device including at least one pair of inductive elements electrically connected in series, said inductive elements being intended to generate two magnetic fields when current is flo...
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JP4293989B2 |
A switch structure having multiple contact surfaces that may contact each other. One or more of the contact surfaces may be coated with a resilient material such as diamond.
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JP4292532B2 |
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JP2009524191A |
The invention relates to a method, a system and a multi stable arranged to switch the configuration of the signal path for electrical signals comprising a first moving element (12) and a second moving element (14), wherein the first and ...
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JP2009134993A |
To provide an MEMS switch in which downsizing is achieved and on/off of an electric current of a large capacity can be carried out surely.A silicon substrate 1 has a support part 2, and one end of a plate-like magnetic body 3 is fixed to...
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JP4278960B2 |
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JP4267600B2 |
A vibration type MEMS switch and a method of fabricating the vibration type MEMS switch. The vibration type MEMS switch includes a vibrating body supplied with an alternating current voltage of a predetermined frequency to vibrate in a p...
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JP2009107487A |
To provide an electric power steering device capable of ensuring a required amount of current even when a switch provided between a motor and a battery side is miniaturized.The switch 8 manufactured using fine electric mechanical system ...
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JP4265630B2 |
A micro-electro mechanical system (MEMS) switch (10) includes a fixed electrode (15) formed on a first face of a substrate, and a movable electric resistor (20) formed on the first face of the substrate and serving as an electric resisto...
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JP2009105031A |
To provide an electrostatic actuator, a microswitch, and an electronic equipment capable of stabilizing motions of a membrane.The electrostatic actuator comprises a suction electrode arranged on a substrate, the membrane arranged facing ...
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JP4262199B2 |
A MEMS switch having spaced-apart RF conductors on a substrate with a bridge structure disposed above the substrate. In one embodiment the bridge structure has two flexible arms supported by two support members and in another embodiment ...
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JP4258439B2 |
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JP2009516346A |
The device ( 100 ) comprises a MEMS element ( 60 ) in a cavity ( 30 ) that is closed by a packaging portion ( 17 ) on a second side ( 2 ) of the substrate ( 10 ). Contact pads ( 25 ) are defined on a flexible resin layer ( 13 ) on an opp...
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JP2009081963A |
To provide an electrostatic actuator suppressing vibration with a structure of a film body itself and to provide a micro-switch, an electronic apparatus, and to provide a method of manufacturing the electrostatic actuator.The electrostat...
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JP2009077479A |
To carry out quick switching control with a wireless switching controller that controls a switch by a radio signal.The wireless switching controller includes: an antenna for receiving radio signals; a SAW correlator that detects a signal...
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JP2009515282A |
A non-volatile memory device and method of manufacturing a non-volatile micro-electromechanical memory cell. The method comprises the first step of depositing a first layer of sacrificial material on a substrate by use of Atomic Layer De...
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JP2009054314A |
To suppress a twisting action by a suspension to prevent a collision between electrodes.This switch has a ground, a movable electrode, and a stationary conductor on the same surface. The ground also has a function serving as a fixed elec...
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JP2009510707A |
A MEMS switch has 1) a first contact, and 2) a second contact that is movable relative to the first contact. At least one of the contacts is electrically conductive and has a platinum-series based material.
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JP2009048875A |
To provide an electrostatic drive actuator in which ratio of maximum capacity value to the minimum capacity value obtained by variations in a variable capacitance element can be further increased than a conventional one.The electrostatic...
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JP4234737B2 |
A MEMS switch according to one aspect of the present invention comprises: a substrate; a fixing portion formed on the substrate; a movable beam including a lower electrode, a first insulation layer formed on the lower electrode, and an u...
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JP2009043537A |
To improve reliability and yield by preventing dust and moisture from adhering to an MEMS structure part.The MEMS switch 1 comprises: a means 6 generating an electric field in a predetermined space; a beam 4 positioned in the space, bent...
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JP4231062B2 |
A micro-electro-mechanical system (MEMS) includes a first electrode interposed between a first fixed end and a second fixed end, the first electrode being movable by an actuator element. The MEMS also includes a substrate on which the fi...
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JP4230706B2 |
A MEMS device having flexure elements with non-linear restoring force. The MEMS device has a substrate, support elements formed on the substrate, a moveable element positioned over the substrate by the support elements to move relative s...
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JP4223246B2 |
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JP2009021227A |
To provide an electromechanical switch capable of being compatible with both low-voltage driving and high isolation.The electromechanical switch has a first beam 106 organizing a driving section, a second beam 107 as a contact section li...
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JP2009016161A |
To provide a high frequency switch in which stiction is effectively evaded.The switch has three sheets of electrodes arranged in which a through hole is provided on one inner sheet and the two outer sheets can be driven by an electrostat...
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