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WO/2006/012253A1 |
According to one embodiment a microelectromechanical (MEMS) switch is disclosed. The MEMS switch includes a substrate, a bottom electrode mounted on the substrate, a top electrode mounted on the bottom electrode, an actuation electrode m...
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WO/2006/011198A1 |
A first parallel circuit, consisting of a first inductor and a first switching element to exhibit a through state when turned on and to exhibit a capacitive state when turned off and performing parallel resonance at a specified frequency...
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WO/2006/007196A2 |
Nanotube transfer devices controllably form a nanotube-based electrically conductive channel between a first node and a second node under the control of a control structure. A control structure induces a nanotube channel element to defle...
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WO/2005/124869A1 |
Provided is a micro-mechanical structure and method for manufacturing the same, including a hydrophilic surface on at least a part of a surface of the micro-mechanical structure, so as to prevent generation of an adhesion phenomenon in t...
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WO/2005/124803A1 |
The invention concerns an arrangement for controlling a non-volatile memory arrangement for a circuit comprising: a micromechanical element coupled to a substrate; the micromechanical element being responsive to deflection means arranged...
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WO/2005/125007A1 |
There is provided a high-frequency element capable of stabilizing DC bias voltage applied to an electrostatic drive type vibrator and a power supply element capable of supplying a stable DC bias voltage. There is also provided a communic...
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WO/2005/119721A2 |
Liquid metal microrelays (500) may be made where a contact (509) is formed by constraining a quantity of liquid metal (509) at the end of a contact support suspended over a substrate (101). Movement of the contact support typically drags...
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WO/2005/117051A1 |
A highly reliable and long-life micromachine switch where fatigue breakage and stiction phenomenon in contact sections are prevented and which is adapted for signal frequency of a wide range. Fixed connection terminals (50) and movable c...
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WO/2005/112126A1 |
The present invention relates to a nanotube device (100) comprising a nanotube with a longitudinal and a lateral extension, a structure for supporting at least a first part of the nanotube, and first means for exerting a force upon the n...
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WO/2005/104717A2 |
An electrostatic actuator having a base (10) including a first electrode (20), and having a flexible membrane (50) including at least two material layers of different materials in contact with each other. At least one of the material lay...
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WO/2005/104158A1 |
Embodiments of the invention describe a contact switch, which may include a bottom electrode structure including a bottom actuation electrode and a top electrode structure including a top actuation electrode and one or more stoppers able...
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WO/2005/101434A2 |
A microswitch comprises a deformable membrane (12) including two substantially parallel flexure arms (13), attached to a substrate via at least one end thereof and comprising thermal actuating means (4). An elongated contact arm (14), su...
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WO/2005/101442A1 |
Integrated circuit with analog connection matrix. The integrated circuit comprises an analog connection matrix having a plurality of analog i/o contacts (2). The analog i/o contacts (2) have a plurality of electric interconnections (4) w...
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WO/2005/089465A2 |
Three trace electromechanical circuits and methods of using same. A circuit includes first and second electrically conductive elements with a nanotube ribbon (or other electromechanical elements) disposed therebetween. An insulative laye...
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WO/2005/084164A2 |
Nanotube-based switching elements and logic circuits. Under one embodiment of the invention, a switching element includes an input node (105), an output node (102), a nanotube channel element (103) having at least one electrically conduc...
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WO/2005/082774A2 |
A method for pseudo-planarization of an electromechanical device and for forming a durable metal contact on the electromechanical device and devices formed by the method are presented. The method comprises acts of depositing various laye...
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WO/2005/083143A2 |
Described are structures useful in microelectronic or MEMS devices such as atomic clocks, sensors, and RF switches, wherein a first materal is deposited onto a substrate to define a first material area of coverage and a second material i...
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WO/2005/083734A1 |
The invention relates to a high-frequency MEMS switch (10) comprising a signal conductor (12), which is located on a substrate (11), in addition to an elongated switching element (13) that has a curved, elastic flexible region (131, 132)...
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WO/2005/078752A1 |
A piezoelectric thin-film electromechanical microsystem (MEMS) device (18) comprising an RF-MEMS switch (14) and a bulk acoustic wave piezoelectric thin-film RF resonator (10) mounted on a substrate (12) provided with an acoustic mirror ...
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WO2004028953B1 |
A microelectromechanical device is provided which includes a beam configured to apply an opening force on a closed switch. The opening force may be substantially independent of a force stored in the closed switch. A combination of the fo...
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WO/2005/069330A1 |
The electro-mechanical micro-switch device includes first and second fixed electrodes. A movable electrode is positioned with respect to the first and second fixed electrodes so that the position of the movable electrode can be selective...
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WO/2005/069331A1 |
An electro-mechanical switch structure includes at least one fixed electrode and a free electrode which is movable in the structure with a voltage potential applied between each fixed electrode and the free, movable electrode. The voltag...
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WO/2005/066987A1 |
A self-healing liquid contact switch (10) and methods for producing such devices are disclosed. An illustrative self-healing liquid contact switch can include an upper actuating surface (30) and a lower actuating surface (32) each having...
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WO/2005/062332A1 |
A fine MEMS switch easily producible and exhibiting an adequate IN/OFF capacitance variation ratio. The MEMS switch comprises a substrate (46), a conductive beam(42) formed on the substrate, and three-layer structure beams (B1, B2) forme...
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WO/2005/048296A2 |
Nanotube-based switching elements with multiple controls and circuits made from such. A switching element includes an input node, an output node, and a nanotube channel element having at least one electrically conductive nanotube. A cont...
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WO/2005/045869A1 |
A bistable MEMS switch for use in selectively opening or closing electrical circuits included in an implantable medical device system is provided. The switch includes central movable beam having a movable contact; a suspension system for...
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WO/2005/043602A2 |
Techniques and structures for three-dimensional inductive micro components are disclosed. The inductive micro components may be used, for example, in micro circuits and may be integrated with other components hermetically sealed in a mic...
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WO/2005/042400A1 |
The electronic device comprising a micro-electromechanical systems (MEMS) element at a first side of a substrate (14). The MEMS element comprises a first electrode (101) and a second electrode (11), that is part of a movable element and ...
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WO/2005/043572A1 |
An RF MEMS device comprising one or more free-standing thin films configured for motion in response to actuation or stimulation, the one or more thin films comprising an alloy of aluminum and magnesium, and optionally one or more further...
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WO/2005/043573A2 |
16 ABSTRACT: A method of manufacturing a micro-electromechanical systems (MEMS) device, comprising providing a base layer (10) and a mechanical layer (12) on a substrate (14), providing a sacrificial layer (16) between the base layer (10...
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WO/2005/036580A1 |
The invention relates to a component (1) for modifying the impedance of a coplanar waveguide (2) which comprises ground wires (3, 4), a signal wire (5) interposed between the ground wires (3, 4), and a conducting connecting element (6). ...
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WO/2005/034279A1 |
A 1:N MEM switch module comprises N MEM switches fabricated on a common substrate, each of which has input and output contacts and a movable contact which bridges the input and output contacts when the switch is actuated. The input conta...
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WO/2005/027257A1 |
A variable capacitance element in which the capacitance can be varied stably relative to temperature variation etc. by warping a movable body constantly in one direction and reliability is enhanced. The movable body (6) is provided displ...
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WO/2005/023699A1 |
The present invention discloses a Micro-Electro-Mechanical systems (MEMS) device suitable for use in a range of applications from DC, such as switching electrical signal lines, to RF applications such as tunable capacitors and switches. ...
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WO/2005/022575A1 |
A micro electromechanical system (MEMS) switch includes a fixed contact (24) and a moveable contact (35) on an armature (30). The switch has electrodes (22, 34) associated with both the fixed and moveable contacts for providing an electr...
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WO/2005/020262A1 |
An electrostatically driven latchable actuator system has an actuator and a pair of side effectors on opposite ends of the actuator. The actuator is resiliently supported to a substrate and is movable along a linear axis between two oper...
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WO/2005/017967A2 |
Under one embodiment, a method of forming a nanotube switching element includes forming a first structure having at least one output electrode, forming a conductive article having at least one nanotube, and forming a second structure hav...
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WO/2005/015595A1 |
A micro switching element (X1), comprising a frame (11), a comb electrode part (12), a pair of fixed contact electrodes (13) separated from each other, a movable part (20), a set of support beams (30A) and a set of support beams (30B) fo...
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WO/2005/015594A2 |
A deformable suspension bridge (1) is attached to a substrate (3) by two ends (7) arranged in such a manner that they transversally subdivide the bridge (1) into a medial segment (8) located between both ends (7) and into two outwardly p...
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WO/2005/006372A1 |
A semiconductor micro-electromechanical system (MEMS) switch provided with noble metal contacts that act as an oxygen barrier to copper electrodes is described. The MEMS switch is fully integrated into a CMOS semiconductor fabrication li...
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WO/2005/006364A1 |
The invention relates to a bistable MEMS microswitch which is created on a substrate and which can electronically connect the ends (12, 13) of at least two conductor tracks (2, 3), comprising a beam (6) suspended above the surface of the...
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WO/2005/001899A2 |
Non-volatile field effect devices and circuits using same. A non-volatile field effect transistor utilizes a nanatube-based mechanical switch (30). The switch location can be at the source, drain or gate locations of the field effect tra...
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WO/2004/114345A2 |
The MEMS element of the invention has a first, a second and an intermediate third electrode. It is given an increased dynamic range in that the switchable capacitor constituted by the second and the third electrode is provided in the sig...
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WO/2004/109708A2 |
Nanoelectromechanical (NEM) memory cells are provided. More particularly, NEM memory cells are provided by anchoring a conductive nanometer-scale beam (e.g., nanotube) to a base and allowing a portion of the beam to move. A charge contai...
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WO/2004/105064A1 |
An electric contact device (X1) comprising a first contact having contact parts (C1, C2), a second contact having a contact part (C3) facing the contact part (C1) and a contact part (C4) facing the contact part (C2), and circuitry (Y1) w...
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WO/2004/097910A2 |
A micro electromechanical (MEMS) switch suitable for use in medical devices is provided, along with methods of producing and using MEMS switches. In one aspect, a micro electromechanical switch including a moveable member configured to e...
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WO/2004/096696A1 |
A method of manufacturing a micromechanical element wherein the method comprises the steps of providing a layer of base material, applying at least one at least partly sacrificial layer of an etchable material, patterning the at least pa...
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WO/2004/096348A2 |
An apparatus for conducting electrical energy to a part of the body (e.g. the heart) and/or for providing sensor data from the body to a device suitably includes an input lead configured to electrically interface with a medical device. A...
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WO/2004/095490A1 |
A microelectromechanical system switch may be formed with a protrusion defined on the substrate which makes contact with a deflectable member arranged over the substrate. The deflectable member may, for example, be a cantilevered arm or ...
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WO2003092048B1 |
A meso-scale MEMS device having a cantilevered beam (113) is formed using standard printed wiring board and high density interconnect technologies and practices. The beam includes at least some polymer material (71) to constitute its len...
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