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WO/2016/022355A1 |
A micro electro mechanical system (MEMS) microphone includes a base; a MEMS die disposed on the base; and a cover coupled to the base and enclosing the MEMS die. The MEMS die includes and diaphragm and back plate and posts extend from a ...
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WO/2016/018624A1 |
A back plate for use in a microphone includes a first layer; a second layer; and a metal layer disposed between the first layer and the second layer. A first compression of the back plate provided by cooling of the first layer and the se...
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WO/2016/015530A1 |
An MEMS microphone comprises a substrate (100), a supporting part (200), an upper polar plate (300) and a lower polar plate (400). The substrate (100) is provided with an opening (120) penetrating the middle thereof; the lower polar plat...
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WO/2016/018625A1 |
A micro electro mechanical system (MEMS) microphone includes a base; a MEMS device disposed on the base, the MEMS device comprising a diaphragm and a back plate; a condition sensor disposed on the base; and an integrated circuit coupled ...
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WO/2016/018563A1 |
This disclosure provides systems, methods and apparatus including microelectromechanical system microphones. In one aspect, the systems include a substrate made of a low dielectric material, such as glass. A layer of semiconductor materi...
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WO/2016/008532A1 |
The present invention concerns a transducer element (1) which comprises a substrate (5) which comprises a cavity (23) extending through the substrate (5), a backplate (3) which is arranged in the cavity (23) of the substrate (5) and a me...
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WO/2016/008106A1 |
A silicon microphone (10) with a high-aspect-ratio corrugated diaphragm (200). The microphone (10) comprises a compliant diaphragm (200) on which at least one ring-shaped corrugation (210) is formed in the vicinity of the edge of the dia...
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WO/2016/008833A1 |
A large aperture CMUT transducer array is formed of a plurality of adjacently located tiles of CMUT cells. The adjacent edges of the tiles are formed by an anisotropic etch process, preferably a deep reactive ion etching process which is...
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WO/2016/007469A1 |
A protective cover for a micro-electro-mechanical system and a related method, wherein the system has an ultrasonic transducer and the protetive over is adjacent to that transducer and has a mass/area ratio of 3g/sm or less.
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WO/2015/197262A1 |
The invention relates to improved microphones and methods for the production thereof, said microphones being characterized by sacrificial layers displaying locally different etching rates.
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WO/2015/196468A1 |
A silicon microphone with a suspended diaphragm and a system with the same are provided, the microphone comprises: a silicon substrate provided with a back hole therein; a compliant diaphragm disposed above the back hole of the silicon s...
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WO/2015/197382A1 |
The present application relates to a transducer element (1) comprising: a movable membrane (2, 2a, 2b) that has a border (4); a frame (5), to which the border (4) of the membrane (2, 2a, 2b) is fastened; and a reinforcement element (10) ...
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WO/2015/197105A1 |
The present invention concerns a microphone (1) which comprises a substrate (7), a transducer element (2) defining a front volume (5), a lid (10) arranged such that the transducer element (2) is arranged between the substrate (7) and the...
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WO/2015/195482A1 |
Techniques for processing audio signals include removing noise from the audio signals or otherwise clarifying the audio signals prior to outputting the audio signals. The disclosed techniques may employ minimum mean squared error (MMSE) ...
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WO/2015/195952A1 |
An improved electrically conductive membrane pump/transducer. The electrically conductive pump/transducer includes an array of electrically conductive membrane pumps that combine to generate a desired sound by moving a membrane (such as ...
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WO/2015/187589A1 |
A top port microelectromechanical systems (MEMS) microphone is presented herein. A device can include a substrate and a MEMS acoustic sensor mechanically attached to the substrate utilizing anchors. Spaces between the anchors can connect...
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WO/2015/173334A1 |
The invention relates to a MEMS loudspeaker (1) for generating sound waves in the audible wavelength spectrum, having a carrier substrate (2) which has a substrate cavity (6) with two substrate openings (7, 8) formed on two opposite side...
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WO/2015/172809A1 |
The present disclosure concerns a microphone assembly (1) comprising a MEMS dual backplate microphone (2) configured to provide a differential output signal, an ASIC (3) comprising a differential amplifier (9) configured to receive the d...
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WO/2015/173333A1 |
The invention relates to a MEMS acoustic transducer (2) for generating and/or registering acoustic waves in the audible wavelength spectrum, comprising: a diaphragm carrier (40); a diaphragm (30) which is connected by its edge region (37...
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WO/2015/169600A1 |
The invention relates to a microphone (1) having a substrate (8), a spring element (14), a conversion element (2) and a cover (25). The spring element (14) is plastically elongated in a direction perpendicular to the substrate (8). The c...
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WO/2015/169485A1 |
The invention relates to a method for producing a multilayered electret structure (10) and to the electret structure (10), comprising the following steps: providing a carrier (12) with an electrode (14) composed of conductive material, a...
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WO/2015/168657A1 |
Systems and methods of sensing audio with a MEMS microphone that modulates a frequency of a phase-locked loop. The MEMS microphone includes a movable electrode and a stationary electrode. The movable electrode is configured such that aco...
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WO/2015/164192A1 |
In one embodiment a micro-electro-mechanical system (MEMS) microphone package includes a multiple layer substrate, an upper acoustic port formed through a plurality of upper layers of the multiple layer substrate and exposing an upper su...
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WO/2015/162248A1 |
The present invention relates to a loud speaker arrangement (1) with a circuit board (2), an MEMS loudspeaker (3) for producing sound waves in the audible wavelength spectrum, said MEMS loud speaker having a membrane (9) deflectable alon...
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WO/2015/161940A1 |
For a microphone having increased rear volume, a cavity housing is proposed that comprises at least one base plate and a cover that define and enclose the cavity. Mounted on the base plate is a microphone transducer, usually an MEMS comp...
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WO/2015/159427A1 |
Provided are: a structure whereby an increase of a drive voltage in a capacitive ultrasonic transducer can be suppressed, and an ultrasonic transmission sound pressure of a CMUT can be increased; and a method for manufacturing the struct...
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WO/2015/157060A1 |
An electrode apparatus of a back plate that is used in a microelectromechanical system (MEMS) microphone is disposed in spaced proximity to a diaphragm. The electrode apparatus includes a support layer and a conductive layer that is arra...
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WO/2015/157059A1 |
A microelectromechanical system (MEMS) die includes a back plate and a diaphragm assembly. The back plate includes a first back plate portion including a first electrode and a second back plate portion including a second electrode, both ...
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WO/2015/149871A1 |
A microphone assembly (1) is provided, the assembly comprising a transducer (2) and an electronic circuit (3) operatively connected to the transducer (2). The electronic circuit (3) comprises a test mode circuitry (12) for selectively se...
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WO/2015/153608A1 |
Systems and methods for preventing electrical leakage in a MEMS microphone. In one embodiment, the MEMS microphone includes a semiconductor substrate, an electrode, a first insulation layer, and a doped region. The first insulation layer...
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WO/2015/146409A1 |
This dielectric film contains an elastomer and nanoparticles that are dispersed in the elastomer in such a state that the nanoparticles are chemically bonded to the elastomer. The nanoparticles have a cyano group and are formed by a sol-...
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WO/2015/147167A1 |
This dielectric film comprises an elastomer (101) and dielectric particles (102), and satisfies a condition (A) [the mean number of references is 0.8/μm or above], condition (B) [the mean number of large particles is 0.2/μm or below], ...
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WO/2015/142486A1 |
Systems and methods for electrical testing of noise in a multi-membrane micro-electro-mechanical systems (MEMS) microphone are disclosed. The MEMS system has a test mode that includes placing the microphones' MEMS biasing networks into a...
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WO/2015/142893A1 |
Disclosed are systems, devices, and methods for minimizing mechanical-vibration- induced noise in audio signals. In one aspect, a microphone is disclosed that includes a first backplate, a first diaphragm, a second backplate, and a secon...
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WO/2015/140645A2 |
A boot is used to cover an inlet of a microphone of an auditory prosthesis. The boot prevents water, sweat, and other debris from damaging the microphone or entering the prosthesis housing. Additionally, the boot can include structure th...
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WO/2015/138116A1 |
A self-testing electro-mechanical capacitive sensor system. The system includes an electro-mechanical capacitive sensor and a controller. The controller is configured to receive a signal to activate a test mode, and upon receiving the si...
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WO/2015/134321A1 |
A micro electro mechanical system (MEMS) microphone includes a MEMS device, a flash memory coupled to the MEMS device, and an external port coupled to the flash memory. The external port is configured to be selectively coupled to an exte...
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WO/2015/131925A1 |
A non-uniform stress distribution of a MEMS microphone having a non-circular shape is compensated by a structured back plate that has a compensating structure to provide a stress distribution opposite to that of the membrane.
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WO/2015/123277A1 |
An apparatus, the apparatus include a housing, a micro electro mechanical system (MEMS) microphone, and a speaker. The MEMS microphone is disposed within the housing. The MEMS microphone has a first diaphragm that separates a first front...
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WO/2015/121638A1 |
An electrostatic transducer (100) comprises an electrically conductive first member (102) having an array of through apertures (1 12) and one or more further members (104, 106). The one or more further members (104, 106) include a flexib...
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WO/2015/121641A1 |
An electrostatic transducer (100) comprises an electrically conductive backplane member (102) having an array of through apertures (112); a spacer member (104) disposed over the backplane member (102), the spacer member (104) having an a...
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WO/2015/117690A1 |
Disclosed are measures for regulating the electrical bias voltage in the measuring capacitor of a MEMS sensor element. A basic voltage is applied to the measuring capacitor and is regulated such that the difference in potential between t...
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WO/2015/119714A1 |
A MEMS microphone package is described that includes a first node and a second node having nearly equivalent 3D parasitic capacitances relative to a preamplifier of the microphone package, such that any noise generated on the first node ...
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WO/2015/112498A1 |
An acoustic apparatus includes a first acoustic sensor that has a first sensitivity and a first output signal; a second acoustic sensor that has a sensitivity, the second sensitivity is less than the first sensitivity, and the second aco...
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WO/2015/106880A1 |
The invention relates to a multi-MEMS module which is economical to produce and which is compact. Said module comprises a housing having an inner chamber and a first and a second opening, a first MEMS chip and a second MEMS chip. Said fi...
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WO/2015/102277A1 |
The present disclosure provides a transducer support, ultrasound probe, and ultrasound imaging apparatus. The ultrasound transducer support includes a first layer having first areas in which heat transfer materials are arranged and secon...
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WO/2015/088874A1 |
An acoustic device comprises a substrate and a housing that affixes to the substrate via an affixment material to thereby encapsulate at least one acoustic transducer such as a microphone. By one approach the housing comprises brass but ...
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WO/2015/085478A1 |
Disclosed is a wireless microphone with low power consumption. A plurality of power supply outputs on a DC-DC boost conversion module on a microphone circuit can respectively provide corresponding working voltages for a microphone audio ...
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WO/2015/082330A1 |
An aircraft engine (10) comprising a gas turbine (13) and a sound generation device (14) for actively reducing the operating noise generated by the gas turbine (13) is characterized in that the sound generation device (14) comprises at l...
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WO/2015/078227A1 |
Provided are a capacitive silicon microphone and a preparation method therefor. The capacitive silicon microphone comprises: a first dielectric layer arranged on a substrate with a back cavity; a lower polar plate located above the back ...
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