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JP4875982B2 |
The present invention provides electroactive polymer transducers that produce out-of-plane deflections. The transducers form a set of surface features based on deflection of an electroactive polymer. The set of surface features may inclu...
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JP4834443B2 |
A MEMS device includes: a first actuator having a first fixed end, including a stacked structure of a first lower electrode, a first piezoelectric film, and a first upper electrode, and being able to be operated by applying voltages to t...
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JP4815756B2 |
To solve a problem in which a conventional electrical fine machine device (MEMS) type actuator needs to have a larger driving arm when having a larger driving area, which causes upsizing. A driving arm 4 which constitutes an actuator 1 i...
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JP4813005B2 |
A self-powered switching device using a prestressed flextensional electrocative member (12) generates a signal for activation of a latching relay (90). The electroactive member (12) has a piezoelectric element with a concave face that ma...
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JP4781472B2 |
In at least one embodiment of a device for galvanic isolation of an electrical connection from a semiconductor switch, the semiconductor switch has two switching contacts and a control contact. The device has a printed circuit board on w...
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JP4761897B2 |
A MEMS switching system includes a power diverter interposed between a signal source and a bank of MEMS switches. The power diverter has an activated state wherein signal power from the signal source is diverted from the bank of MEMS swi...
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JP4744849B2 |
A semiconductor device having a surface MEMS element, includes a semiconductor substrate, and an actuator which is arranged above the semiconductor substrate via a space and has a lower electrode, an upper electrode, and a piezoelectric ...
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JP4740751B2 |
The present invention provides an electromechanical switch enabled to achieve a high-speed switching response at a low driving voltage. An electromechanical switch body 10, which is an MEMS switch, has a first movable electrode 14 and a ...
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JP4721045B2 |
To provide a movable element which can control an generation of a stiction and a semiconductor device, a module and an electronic device using the movable element. The movable element is provided on a semiconductor base plate 1 with a si...
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JP4701113B2 |
Disclosed is a switch having first and second mated substrates defining therebetween a number of cavities. A plurality of wettable surfaces is deposited in one or more of the cavities. A switching fluid, held within one or more of the ca...
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JP4692739B2 |
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JP4691112B2 |
Provided is a method for producing a contact device, including a step of forming a first conductive film; a step of forming a second conductive film containing a metal or an alloy of the metal on the first conductive film; a step of form...
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JP2011076725A |
To provide a piezoelectric driving type MEMS element capable of improving production yield and reducing a cost with a simple manufacturing process.The piezoelectric driving type MEMS element 1 is composed of: a first substrate 10 which i...
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JP4613165B2 |
A micro electromechanical system (MEMS) switch includes a fixed contact (24) and a moveable contact (35) on an armature (30). The switch has electrodes (22, 34) associated with both the fixed and moveable contacts for providing an electr...
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JP2010282886A |
To provide a liquid metal relay capable of preventing the generation of arc upon opening between contact points.The liquid metal relay includes: a fixed contact point 2 made of liquid metal; a movable contact point 1 made of solid metal ...
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JP2010282890A |
To provide a liquid metal relay capable of preventing the generation of arc upon opening between contact points.The liquid metal relay includes: a first fixed contact point 1 including fixed contact points 1a and 1b made of solid metal a...
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JP4586642B2 |
To provide a movable element facilitating a manufacturing process, never disturbing reduction of a package size, and having low voltage/low power consumption to an extent allowing itself to be integrally formed with a low voltage/low pow...
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JP4580826B2 |
A micro-mechanical device includes a first piezoelectric actuator including a piezoelectric film, and lower and upper electrodes interleaving the piezoelectric film, and extending from a first fixing part on a substrate to a first operat...
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JP4580745B2 |
A piezoelectric driving type MEMS apparatus includes: a supporting portion provided on a substrate; and a piezoelectric actuator, which is supported on the supporting portion, including a piezoelectric film and a driving electrode config...
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JP2010232113A |
To provide an RF-MEMS switch with a simple structure, easy to manufacture, compactly constituted, and with its information signal and an on/off operation hardly affected by noise, and, therefore, capable of surely carrying out on/off cha...
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JP2010177143A |
To provide a piezoelectric drive type MEMS switch capable of suppressing deviations in a structure caused by bending of a driving part and having stable electrical characteristics and effective in power consumption saving.The piezoelectr...
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JP4504237B2 |
A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base substrate, and a piezoelectric drive provide...
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JP4465341B2 |
An RF MEMS switch (100) and a method for fabricating the same are disclosed, in which the RF MEMS device is down driven at a low voltage using a piezoelectric effect. The RF MEMS switch includes a substrate (101) provided with RF signal ...
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JP2010061976A |
To provide a switch capable of reducing contact resistance between an electrode and a contact member.The switch includes an electrode 14 arranged on a substrate 11, an anchor 15 arranged on the substrate 11, a movable structure 16 suppor...
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JP4431030B2 |
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JP2010034048A |
To provide an MEMS and an MEMS array capable of functioning under severe environments, reliable, and high in cost effectiveness, wherein the MEMS array is manufacturable using technology conforming to existing integrated circuit manufact...
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JP4413873B2 |
To provide an actuator for a microswitch which can exert ample displacement generating force and amount for mechanically carrying out connection and disconnection of electrical and optical signals, and which is compact and has high durab...
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JP4408266B2 |
A microswitch is provided with a movable electrode contact component including a bending displacement component having a cantilever shape, a piezoelectric/electrostrictive element having a piezoelectric/electrostrictor and a voltage appl...
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JP4404031B2 |
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JP4402682B2 |
A downward type micro electro mechanical system (EMS) switch and a method of fabricating the same is provided. The downward type MEMS switch includes first and second cavities formed in a substrate, first and second actuators formed on u...
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JP2010003573A |
To provide a contact switching device capable of preventing short circuit between contacts when they are switched over from a switched-on state to a switched-off state with a comparatively simple structure.The contact switching device ha...
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JP2010500711A |
The proposed invention application describes a novel configuration of an extremely small self-locking switching component, based on micro-electromechanical systems (MEMS) technology. Conventional MEMS switches need a continual control si...
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JP4386014B2 |
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JP4386767B2 |
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JP4386013B2 |
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JP2009285797A |
To provide a micro electric machine system (MEMS) apparatus enhancing a capacitance ratio or insulation characteristics, and also enhancing an accuracy of an airtightness test, by reducing a parasitic capacitance of wiring.The micro elec...
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JP4377740B2 |
A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that t...
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JP4366310B2 |
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JP2009252516A |
To provide an MEMS switch in which a parasitic capacitance between a first contact electrode and a second contact electrode are reduced and a driving voltage is lowered and moreover a contact reliability is improved.The MEMS switch inclu...
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JP2009252598A |
To provide an MEMS switch in which a reduction of a transfer loss is attained and moreover a contact pressure is enlarged as well while isolation characteristics are improved.The MEMS switch includes a pair of signal lines 34, 34 which a...
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JP2009252378A |
To provide an MEMS switch which reduces a parasitic capacitance between a movable contact and both of stationary contacts.The MEMS switch includes a base board 1, a pair of signal lines 34, 34 which are formed on the one surface side of ...
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JP2009238547A |
To provide a MEMS (micro electro mechanical system) switch which reduces a parasitic capacitance between a movable contact and both fixed contacts and secures a desired contact pressure while realizing a low power consumption.The MEMS sw...
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JP2009531821A |
The switch has a thermal connecting element (10) between two interfaces (1, 2), where the element is made resilient and has sufficient thermal conductivity to present a weak thermal gradient between the interfaces. An actuator (20) e.g. ...
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JP2009193804A |
To provide an actuator which has an improved operation accuracy.The actuator is provided with a frame body 17 having a hole 16 on a surface, a transmission electrode portion 18 arranged on an upper side of the hole 16, and a driving port...
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JP4316590B2 |
It is made possible to provide a piezoelectric driven MEMS device having the distance between the action end and the fixed electrode which is kept constant regardless of whether the residual strain is large or small and having a mechanis...
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JP2009528667A |
MEMS piezoelectric switches 100 that provide advantages of compact structure ease of fabrication in a single unit, and that are free of high temperature-induced morphological changes of the contact materials and resultant adverse effects...
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JP2009171737A |
To provide an actuator of which the maximum electrostatic capacity is made large by reducing the influence of warpage of a beam, and, moreover, in which steep variation in the electrostatic capacity around the maximum electrostatic capac...
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JP2009158363A |
To propose a switch capable of reducing power consumption at non-driving times, and applicable to a battery-driven portable electronic unit or the like for which consumption power is to be a problem.The switch 1 is provided with a cylind...
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JP2009140799A |
To provide an inexpensive switch without necessity of another mounting package.Two sheets of substrates 9, 10 at least at one of which an outside electrode is installed are mutually stuck to form a cavity part in the interior. In this ca...
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JP2009134993A |
To provide an MEMS switch in which downsizing is achieved and on/off of an electric current of a large capacity can be carried out surely.A silicon substrate 1 has a support part 2, and one end of a plate-like magnetic body 3 is fixed to...
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