To provide an MEMS switch in which a parasitic capacitance between a first contact electrode and a second contact electrode are reduced and a driving voltage is lowered and moreover a contact reliability is improved.
The MEMS switch includes a base board 1, a pair of signal lines 34, 34 which are arranged on one surface side of the base board 1, have the first contact electrodes 35, 35, and a second contact electrode 25 which does not overlap on the first contact electrodes 35, 35 in a thickness direction of the first contact electrodes 35, 35 and is arranged in a diagonal direction inclining from the thickness direction against the first contact electrodes 35, 35. The switch is also provided with a piezo-electric driving actuator 4 composing a longitudinal direction driving portion with a thickness direction as a driving axis direction and a static driving actuator 5 composing a latitudinal driving portion with a right angle crossing direction to the thickness direction as a driving axis direction, as a driving means for displacing the second contact electrode 25 so that the second contact electrode 25 and the first contact electrodes 35, 35 attach and detach with each other.
YOSHIHARA TAKAAKI
SHIRAI TAKEO
MATSUSHIMA CHOMEI
KAWADA HIROSHI
HAGIWARA YOSUKE
Atsuo Mori