Title:
圧電駆動型MEMSアクチュエータ
Document Type and Number:
Japanese Patent JP4316590
Kind Code:
B2
Abstract:
It is made possible to provide a piezoelectric driven MEMS device having the distance between the action end and the fixed electrode which is kept constant regardless of whether the residual strain is large or small and having a mechanism which is excellent in reproducibility and reliability. Two piezoelectric driven actuators each having a folded beam structure are disposed in parallel and in a line-symmetric manner, and connected to each other in the vicinity of an action end.
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Inventors:
Takashi Kawakubo
Toshihiko Nagano
Toshihiko Nishigaki
Toshihiko Nagano
Toshihiko Nishigaki
Application Number:
JP2006173605A
Publication Date:
August 19, 2009
Filing Date:
June 23, 2006
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H02N2/00; B81B3/00; H01H57/00; H01L41/09
Domestic Patent References:
| JP2006087231A | ||||
| JP5347439A | ||||
| JP7124103A |
Foreign References:
| WO2005059933A1 |
Attorney, Agent or Firm:
Kenji Yoshitake
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki