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WO/1998/039609A1 |
A vertically oriented thermal processor (10) for processing batches of semiconductor wafers held within a processing chamber (16). The processing chamber (16) is contained within a processing vessel (18). A furnace liner (82) surrounds t...
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WO/1998/037258A1 |
A novel rapid thermal process (RTP) barrel reactor (100) processes a larger batch of semiconductor substrates (170) than was previously possible. The RTP barrel reactor is characterized by a short process cycle time in comparison to the ...
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WO/1998/010034A1 |
An apparatus (10) for the carbonization of materials, such as coal, comprising an elongated coking retort (10) defined by an annulus which constitutes the coking chamber (10) within which the coal is carbonized indirectly by conduction. ...
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WO/1996/041109A1 |
A substrate thermal condtioning apparatus (10) with a chamber (12), a plate (32) located in the chamber (12) and a gas supply (14). The plate (32) has a top heat transfer surface with grooves (42) therealong. A substrate (S) is placed on...
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WO/1996/015208A1 |
This invention discloses a new method for the production of coke from coals. In the present invention, coke is continuously produced by heating a moving charge of coal inside the annular cross-section (13) defined by two concentric tubes...
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WO/1994/017353A1 |
A rapid thermal process (RTP) reactor (200, 220) processes a plurality of wafers (210) or a single large wafer (250) using either a single (204) or dual (204, 224) heat source. The wafers (210) or wafer (250) are mounted on a rotatable s...
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WO/1994/016278A1 |
The object of the present invention is a vacuum furnace for thermal treatment, particularly for quenching of metal workpieces made of various grades of steel and alloys. According to the invention the furnace has on the perimeter of the ...
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WO/1993/026137A1 |
Performance of a high temperature diffusion furnace (10) is enhanced by an improved multi-furnace module design (11). The furnace (10) is constructed of materials suitable for clean room environments with an adjustable leveling frame ass...
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WO/1993/024801A1 |
In a hardening installation, especially for magazines (7) with lead frames fitted with electronic components, there is at least one box (R2) closable by a door (6) in which is arranged at least one fan (17a, 17b) to pass hot gas over the...
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WO/1991/010873A1 |
In a rapid thermal heating apparatus lamps (19) are disposed in a plurality of light pipes (21) arranged to illuminate and supply heat to a substrate (61). The light pipes (21) are positioned so that the illumination patterns overlap. Th...
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WO/1991/009976A1 |
Apparatus for cooling a vacuum furnace load (10) comprises a chamber (1) and a plenum (6) within the chamber for distributing a gas from a supply (2) of liquified gas over a load (10). An inlet valve (5) is provided for controlling flow ...
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WO/1989/012701A1 |
An apparatus (10) and a method for applying a chromized coating (46, 60, 62, 66) to one or more of the surfaces of an article (44, 56, 58, 64) particularly in those situations in which the article (44, 56, 58, 64) is intended to be emplo...
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WO/1988/006145A1 |
A heating furnace in which a porous glass material for optical fiber, which consists of fine quartz glass particles, is heat-treated in a fluoride-containing gaseous atmosphere so as to add fluorine thereto and make it transparent and ob...
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WO/1987/003508A1 |
The device comprises at least a feeding station (16, 18, 20), a heated processing chamber (22, 24, 26) and at least one material removing device (28, 30, 32). The processing chamber is formed with a bottom (40, 42, 44) which can vibrate ...
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WO/1983/001677A1 |
The heating device according to the invention relates to open kilns with revolving fire, comprising an assembly of chambers heated by gases which circulate in hollow partition walls (19, 25) which subdivide said chambers into compartment...
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WO/1981/002309A1 |
A furnace comprises a heating chamber (1) in which articles are placed and which is formed with walls (2, 3), an arch (4) and a bottom (5), an evaporating reservoir (6) filled in with a working substance (7) and a heater (8) for this sub...
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WO/1981/000296A1 |
A method for processing various organic materials such as lignocellulosics or biomass into more useful states, such as charcoal, carbon black, and coke, and other processed products while producing useful off-gases, includes feeding aggr...
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JP2024066251A |
An object of the present invention is to suppress the occurrence of cracks in a processed object due to excessive removal of a bonding agent. [Solution] In a heat treatment method that controls the supply of superheated steam to a heatin...
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JP2024057470A |
The present invention provides a heat treatment apparatus that can improve the mechanical strength of a metal member to a high degree. [Solution] A heat treatment device 1 heats a heating chamber 20, a cooling chamber 80, and a metal mem...
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JP7465862B2 |
Provided are a heating furnace and a graphite production method both of which allow a carbonization step and a graphitization step to be consecutively performed. The heating furnace is a heating furnace for producing graphite from a poly...
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JP2024049807A |
An object of the present invention is to provide a heat treatment device that can suppress the generation of particles even when the heater expands and contracts in the direction along the central axis when the heater is turned on and of...
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JP7458137B1 |
The present invention provides a heat source holding mechanism, a heat source holding method, and a semiconductor processing apparatus for use in a semiconductor processing apparatus that can prevent seal deterioration. A heating source ...
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JP2024035715A |
[Problem] To provide a heating structure for an industrial furnace that has excellent heating efficiency and a long fan life. [Solution] A recuperator 50 is provided in an exhaust passage 51 and takes in room temperature air blown from a...
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JP2024035716A |
[Problem] To provide a heating structure for an industrial furnace that has excellent heating efficiency and a long fan life. [Solution] During low output, the open/close states of the first on-off valve 21 and the fourth on-off valve 24...
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JP2024031994A |
An object of the present invention is to design a heat treatment apparatus that is more suitable for processing at very high temperatures. The present invention is an apparatus for heat treating a product, the apparatus comprising a hous...
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JP7430469B2 |
An arrangement for heat treating a multilayer body, which arrangement comprises an energy source with at least one radiant heater for generating heating radiation, a multilayer body, and an intermediate element arranged between the energ...
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JP2024011002A |
[Problem] To provide an electric furnace with excellent heating efficiency and a long fan life. [Solution] The opening and closing states of the first on-off valve 21, the fourth on-off valve 24, and the fifth on-off valve 25 are reverse...
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JP7416554B1 |
The present invention provides a heat source holding mechanism, a heat source holding method, and a semiconductor processing apparatus for use in a semiconductor processing apparatus that can prevent seal deterioration. [Solution] A heat...
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JP7414205B2 |
To provide a heat treatment device capable of preventing the clogging of an exhaust pipe with a released substance released from an object to be treated.A heat treatment device 10 comprises: a pressure container 12: a first heat insulati...
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JP7408253B2 |
To provide an industrial furnace in which a treating object in the furnace can be appropriately treated in a clean state by preventing dusting or deterioration of a filter by temperature change, when circulating heating gas or cooling ga...
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JP7407495B2 |
The present disclosure is aimed at providing a heat treatment furnace and a heat treatment method that have sufficient performance in terms of the atmosphere gas in the heat treatment furnace and that can reduce the amount of carbon-base...
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JP7406701B2 |
To provide an industrial furnace capable of applying prescribed pressure to an object to be treated.An industrial furnace 10 comprises: a container-shaped furnace body 12; a punch 18 applying pressure to an object 14 to be treated; a pre...
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JP2023182979A |
To provide a conversion furnace which can attain the improvement of the operability in an exchange operation of a cylindrical heat insulation material upon exchanging a heater.A gas tube 11 comprises a catalyst 20 for modifying a primary...
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JP7398107B2 |
To provide a heating device which improves uniformity of temperature distribution and stability of cleanliness and is also capable of dealing with heat treatment of a heated object of comparatively large heat capacity, and a heating meth...
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JP7398032B2 |
To provide an industrial furnace capable of easily removing an emission.An industrial furnace 10 comprises: a pressure container 12 comprising an inner wall 44 and an outer wall 46; heat insulator 16 arranged at an internal space 14 of t...
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JP2023173176A |
To provide a heat treatment facility which is capable of executing a series of heat treatments including a bluing treatment to a heat treatment object and capable of executing re-starting up in a short time even when the composition of a...
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JP7387969B2 |
To provide a heat processing apparatus in which gas supplied into a muffle uniformly flows in the muffle.A heat processing apparatus 10 comprises: a pressure container 12, a heat insulation body 16 disposed inside the pressure container ...
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JP2023167565A |
To provide a muffle structure for cylindrical furnace (including vertical cylindrical furnace and horizontal cylindrical furnace), superior in durability, small in heat capacity, not requiring a large-scale manufacturing facility, and ca...
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JP7386045B2 |
Provided is a heat treatment device, which further reduces the load applied to a tube which accommodates an object to be processed. The heat treatment device (1) includes: a horizontal tube (4) including an opening portion (4a) for putti...
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JP7379135B2 |
The present invention relates to a heat treatment device. According to the present invention, a heat treatment furnace (20) has an opening (201) through which a workpiece (WK) is transferred. A transfer chamber (30) is connected to the h...
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JP7377021B2 |
To provide a heat treatment device, a heat treatment system and a method for producing a heat-treated product capable of suitably performing heat treatment to an object even if a heating temperature is made high.A heat treatment device 1...
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JP7360584B2 |
To provide a heat treatment device capable of informing the timing of cleaning to an operator.A heat treatment device 10 comprises: a pressure container 12; a heat insulation body 14 arranged at the inside of the pressure container 12; a...
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JP7361169B2 |
To improve maintainability of a continuous heating furnace.A continuous heating furnace 10 disclosed here comprises a tunnel-shaped furnace body 11 provided with a carry-in port 11a and a carry-out port 11b, and a cylindrical muffle 30 t...
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JP7356298B2 |
To provide a batch-type nitriding reaction furnace capable of uniformly completing a nitriding reaction in a short time, and suppressing deterioration of a heater and a heat insulation material caused by a by-product gas.A nitriding reac...
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JP7356297B2 |
To provide a batch-type nitriding reaction furnace capable of uniformly completing a nitriding reaction in a short time, and suppressing deterioration of a heater and a heat insulation material caused by a by-product gas.A nitriding reac...
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JP7339853B2 |
In a heat treatment apparatus, a load applied to a tube which accommodates a processed object is further reduced. The heat treatment apparatus (1) comprises: a horizontal tube (4) including an opening (4a) for putting in and taking out a...
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JP2023124377A |
To provide a detector normally operating even at the inside of a chamber made into a high temperature upon heat treatment.A detector 50 is provided at the inside of a chamber heat-treating a workpiece and pressed by the workpiece conveye...
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JP7338818B2 |
To provide a heat treatment furnace capable of uniformly cooling an object to be treated.A heat treatment furnace 10 comprises a pressure container 12, a heat insulation body 16, a heater 20, a first port 26 feeding a cooling gas to an i...
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JP7312298B2 |
To provide a debinding furnace in which it is easy to remove a binder generated from a heated material from the inside of a furnace body, and which can obtain sufficient sintering quality in sintering in the furnace body.A debinding furn...
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JP7308367B2 |
An apparatus for and a method of microwave heating of rotatable articles includes at least one microwave radiation source, at least one wave guide and a heating chamber for receiving a rotatable article which comprises a material absorbi...
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