Title:
VAPORIZER
Document Type and Number:
WIPO Patent Application WO/2023/120402
Kind Code:
A1
Abstract:
This vaporizer is composed of: a flow path through which material gas flows; one or more replaceable heaters that heat the flow path; a manipulator which is connected to the heater to displace the heater toward or away from the flow path; a guide that defines the movable range of the heater; and a stopper that fixes the positional relationship between the manipulator and the guide. Thus, a vaporizer is achieved in which a heater can be replaced easily even when installed in a narrow and dense manner. Preferably, at least a part of the manipulator is located in a position allowing for a direct touch by a finger of a hand through an opening that appears by removing an opening surface of a case.
Inventors:
SAWADA AKINORI (JP)
Application Number:
PCT/JP2022/046349
Publication Date:
June 29, 2023
Filing Date:
December 16, 2022
Export Citation:
Assignee:
PROTERIAL LTD (JP)
International Classes:
H01L21/31; B01J7/02; C23C16/448; F16K49/00; F16L53/38; H01L21/205
Domestic Patent References:
| WO2018179999A1 | 2018-10-04 |
Foreign References:
| JP2005322797A | 2005-11-17 | |||
| JP2003065462A | 2003-03-05 | |||
| JP2006349075A | 2006-12-28 |
Attorney, Agent or Firm:
PROSPEC PATENT FIRM (JP)
Download PDF: