Title:
THIN-FILM LITHIUM NIOBATE ELECTRO-OPTICAL MODULATOR BASED ON DIFFERENTIAL DRIVE AND PUSH-PULL
Document Type and Number:
WIPO Patent Application WO/2024/082974
Kind Code:
A1
Abstract:
Disclosed in the present invention is a thin-film lithium niobate electro-optical modulator based on differential drive and push-pull, comprising a substrate, a buried oxide layer, a lithium niobate layer and a cladding layer. A thin-film lithium niobate optical waveguide is provided under the cladding layer; a differential traveling wave electrode is provided on the cladding layer, and comprises a periodic structure electrode, a positive signal electrode, a negative signal electrode and grounding electrodes; the periodic structure electrode comprises metal electrode groups connected to the positive signal electrode and the negative signal electrode; each metal electrode group comprises a plurality of metal electrodes which are uniformly distributed in the waveguide direction at intervals and are T-shaped or in the shape of the Chinese character "土"; longitudinal metal strips are connected to the positive signal electrode/negative signal electrode; and transverse metal strips are arranged in parallel to the waveguide direction; metal electrodes of the positive signal electrode and the negative signal electrode are sequentially and alternately arranged and are mutually embedded and inserted. According to the present invention, differential drive and a push-pull structure are combined on a thin-film lithium niobate platform for the first time, and a periodic electrode having a specific structure is introduced, so that double voltage modulation is realized.
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Inventors:
DAI DAOXIN (CN)
WANG MAI (CN)
CHEN GENGXIN (CN)
WANG MAI (CN)
CHEN GENGXIN (CN)
Application Number:
PCT/CN2023/123393
Publication Date:
April 25, 2024
Filing Date:
October 08, 2023
Export Citation:
Assignee:
UNIV ZHEJIANG (CN)
International Classes:
G02F1/03; G02B6/12
Foreign References:
| CN115586663A | 2023-01-10 | |||
| CN114981694A | 2022-08-30 | |||
| CN113325612A | 2021-08-31 | |||
| CN114460684A | 2022-05-10 | |||
| CN111665646A | 2020-09-15 | |||
| CN110187526A | 2019-08-30 | |||
| US20190025507A1 | 2019-01-24 |
Attorney, Agent or Firm:
HANGZHOU QIUSHI PATENT OFFICE CO., LTD. (CN)
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