Title:
THERMOSENSITIVE THIN FILM, INFRARED DETECTOR, AND MANUFACTURING METHOD FOR INFRARED DETECTOR
Document Type and Number:
WIPO Patent Application WO/2024/087338
Kind Code:
A1
Abstract:
The present application relates to the technical field of thermosensitive materials and infrared detection. Disclosed are a thermosensitive thin film, an infrared detector, and a manufacturing method for the infrared detector. The thermosensitive thin film comprises SnSex particles, wherein x=1-2. The temperature coefficient of resistance (TCR) of the provided thermosensitive thin film is as high as 9.1 %/K, and is higher than that of traditional vanadium oxide and amorphous silicon thermosensitive thin films, so that the signal response intensity of a device comprising the thermosensitive thin film can be improved, and the performance of the device can be improved.
Inventors:
LIU XUHUI (CN)
LI WENJIE (CN)
YANG CHUNLEI (CN)
DENG LIGANG (CN)
TAN ZHONGYING (CN)
LI WENJIE (CN)
YANG CHUNLEI (CN)
DENG LIGANG (CN)
TAN ZHONGYING (CN)
Application Number:
PCT/CN2022/138205
Publication Date:
May 02, 2024
Filing Date:
December 09, 2022
Export Citation:
Assignee:
SHENZHEN INST ADV TECH (CN)
International Classes:
G01J5/20; C30B25/02; C30B29/46; G01J5/22
Foreign References:
| JPH07151609A | 1995-06-16 | |||
| CN103482589A | 2014-01-01 | |||
| CN113324662A | 2021-08-31 | |||
| CN112113669A | 2020-12-22 | |||
| CN112820787A | 2021-05-18 | |||
| CN114122192A | 2022-03-01 | |||
| CN114300568A | 2022-04-08 | |||
| US20200027916A1 | 2020-01-23 |
Attorney, Agent or Firm:
BEIJING ZHONG XUN TONG DA INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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