Title:
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR DRIVING DOOR ASSEMBLY
Document Type and Number:
WIPO Patent Application WO/2023/003309
Kind Code:
A1
Abstract:
The present invention provides an apparatus for processing a substrate. The apparatus for processing a substrate comprises: a chamber that has a processing space for processing a substrate and an entrance through which a substrate enters and exits; a gas supply unit that supplies a process gas to the processing space; a plasma unit that generates plasma from the process gas; and a door assembly that opens and closes the entrance, wherein the door assembly includes a door that opens and closes the entrance, and a door actuator that moves the door between an open position and a closed position, and the door may include a housing having a passage at one side thereof, wherein an air flow is induced in the passage, and an internal space, a valve that opens or closes the passage, and a valve actuator that moves the valve between an open position and a closed position.
More Like This:
| JP3640373 | SUBSTRATE-MOUNTING BASE |
| JPS60227487 | HEATER CHIP |
| JPS6245038 | WAFER PROCESSING |
Inventors:
KANG JUNG HYUN (KR)
Application Number:
PCT/KR2022/010490
Publication Date:
January 26, 2023
Filing Date:
July 19, 2022
Export Citation:
Assignee:
PSK INC (KR)
International Classes:
H01L21/67; F16K3/02; F16K51/02; H01J37/32
Foreign References:
| KR20150116003A | 2015-10-15 | |||
| KR101099603B1 | 2011-12-29 | |||
| KR101654619B1 | 2016-09-23 | |||
| US20200166154A1 | 2020-05-28 | |||
| KR20200049739A | 2020-05-08 |
Attorney, Agent or Firm:
KWON, Hyuk-Soo et al. (KR)
Download PDF:
Previous Patent: CAMERA MODULE
Next Patent: METHOD AND APPARATUS FOR SELECTING FREQUENCY BAND FOR UE IN A WIRELESS NETWORK
Next Patent: METHOD AND APPARATUS FOR SELECTING FREQUENCY BAND FOR UE IN A WIRELESS NETWORK