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Title:
SLIDING-TYPE ANTI-LOOSENING FASTENING STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2023/167460
Kind Code:
A1
Abstract:
The present invention relates to a sliding-type anti-loosening fastening structure between a first member and a second member, wherein an unlocking cap slides to prevent a fixing bolt coupling the first member and the second member from loosening and exerting decreased fastening force during work, and thus machining and assembly errors can be reduced. The present invention can be applied to a plasma shower head and a gas distribution plate, which are semiconductor manufacturing devices.

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Inventors:
PARK JIN KYUNG (KR)
Application Number:
PCT/KR2023/002503
Publication Date:
September 07, 2023
Filing Date:
February 22, 2023
Export Citation:
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Assignee:
TEM CO LTD (KR)
International Classes:
F16B39/10; F16B37/04; F16B39/12; F16B39/24; F16B39/28; H01J37/32
Foreign References:
KR101980255B12019-05-21
KR20120104112A2012-09-20
KR102167800B12020-10-19
JP2016109277A2016-06-20
US20090116930A12009-05-07
Attorney, Agent or Firm:
YOON & YANG (IP) LLC (KR)
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