Title:
FIXING-TYPE ANTI-LOOSENING FASTENING STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2023/167459
Kind Code:
A1
Abstract:
The present invention relates to a fixing-type anti-loosening fastening structure capable of fixing a first member and a second member that are same as or different from each other, and in order to prevent the coupling force from being reduced because a fixing bolt coupling the members is loosened during operation, a locking cap is coupled to the fixing bolt. In particular, a fixing-type anti-loosening fastening structure of a shower head for plasma and a gas distribution plate can be provided, the fixing-type anti-loosening fastening structure being capable of being applied to a fastening structure of a shower head for plasma and a gas distribution plate, included in a semiconductor manufacturing apparatus, so as to prevent a decrease in fastening force because a distribution plate fixing bolt coupling together a shower head portion and a gas distribution portion is loosened during operation.
More Like This:
| WO/2004/042243 | APPARATUS FOR LOCKING SCREW-THREADED FIXING DEVICES |
| JP6017288 | Rotation control structure of a nut |
Inventors:
PARK JIN KYUNG (KR)
Application Number:
PCT/KR2023/002502
Publication Date:
September 07, 2023
Filing Date:
February 22, 2023
Export Citation:
Assignee:
TEM CO LTD (KR)
International Classes:
F16B39/10; F16B37/04; F16B39/24; H01J37/32; H01L21/67
Foreign References:
| KR101980255B1 | 2019-05-21 | |||
| KR20120104112A | 2012-09-20 | |||
| KR102167800B1 | 2020-10-19 | |||
| KR20150115411A | 2015-10-14 | |||
| JPH06330925A | 1994-11-29 | |||
| US20090116930A1 | 2009-05-07 |
Attorney, Agent or Firm:
YOON & YANG (IP) LLC (KR)
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