Title:
SCANNING METHOD OF SCANNING ELECTRON MICROSCOPE, AND SCANNING ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2024/087395
Kind Code:
A1
Abstract:
A scanning method of a scanning electron microscope (100), and a scanning electron microscope (100). The scanning electron microscope (100) comprises a first detector (4) and a second detector (5) arranged opposite to each other. The scanning method comprises: performing multiple interlaced scans on a target sample (10) in a first direction and a second direction, so as to form a detection image of the target sample (10) according to electron beams received by the first detector (4) and the second detector (5), wherein rows corresponding to two adjacent interlaced scans are different, the multiple interlaced scans correspond to all rows of the target sample (10), each row of the target sample (10) corresponds to at least two interlaced scans, the at least two interlaced scans at least comprise scanning the row in the first direction and scanning the row in the second direction, and the second direction is the reverse direction of the first direction. A more accurate sample detection image can be provided.
Inventors:
CHEN HANGWEI (CN)
Application Number:
PCT/CN2023/070548
Publication Date:
May 02, 2024
Filing Date:
January 04, 2023
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
H01J37/147; H01J37/28
Attorney, Agent or Firm:
BEIJING INTELLEGAL INTELLECTUAL PROPERTY AGENT LTD. (CN)
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