Title:
PREPARATION METHOD FOR ACOUSTIC RESONATOR, AND ACOUSTIC RESONATOR
Document Type and Number:
WIPO Patent Application WO/2022/193419
Kind Code:
A1
Abstract:
The present invention relates to a preparation method for an acoustic resonator, and an acoustic resonator. The preparation method for an acoustic resonator comprises: providing a piezoelectric substrate comprising one of lithium niobate and lithium tantalate, and depositing a first acoustic reflection layer on a bottom electrode layer. By means of selecting a specific direction of the piezoelectric substrate, an acoustic resonator prepared by using the preparation method for an acoustic resonator can be excited to be in a thickness-direction shear vibration mode. In the acoustic resonator, the more superior thickness-direction shear vibration mode is used, and a lithium niobate or lithium tantalate material which can support the vibration mode is selected, such that the acoustic resonator can support high electromechanical coupling at a frequency not less than 3 GHz.
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Inventors:
GONG SONGBIN (CN)
LV RUOCHEN (CN)
LV RUOCHEN (CN)
Application Number:
PCT/CN2021/092031
Publication Date:
September 22, 2022
Filing Date:
May 07, 2021
Export Citation:
Assignee:
SPECTRON SHENZHEN TECH CO LTD (CN)
International Classes:
H03H9/17
Foreign References:
| CN110224680A | 2019-09-10 | |||
| CN111245387A | 2020-06-05 | |||
| US20130038408A1 | 2013-02-14 | |||
| CN111919383A | 2020-11-10 | |||
| CN103283147A | 2013-09-04 |
Attorney, Agent or Firm:
ADVANCE CHINA IP LAW OFFICE (CN)
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