PNEUMATIC CONTROL MODULE AND ELEMENT HANDLER HAVING SAME

WIPO Patent Application WO/2022/203457

A1

The present invention relates to a pneumatic control module. More specifically, the present invention relates to a pneumatic control module and an element handler having same, the pneumatic control module controlling air pressure for a pneumatic actuator which generates driving force using negative pressure and positive pressure. The present invention provides a pneumatic control module comprising: a main block (510) in which a positive pressure flow path (520) and a negative pressure flow path (530) are formed in parallel with each other and a plurality of output flow paths (540) perpendicular to the positive pressure flow path (530) and the negative pressure flow path (520) are formed; a plurality of first valves (200) which are installed at the main block (510) in correspondence to the plurality of output flow paths (540), respectively, and selectively communicate the positive pressure flow path (520) and a connection flow path (560) formed in the main block (510); and a plurality of second valves (300) which are installed at the main block (510) in correspondence to the plurality of output flow paths (540), respectively, and selectively communicate the output flow paths (540) and one of the connection flow path (560) and the positive pressure flow path (520 ).

YOU HONG JUN (KR)
LEE YONG SIK (KR)

PCT/KR2022/004237

September 29, 2022

March 25, 2022

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JT CORP (KR)

F15B13/08; F15B11/06; F15B11/16; F16K51/02; H01L21/67; H01L21/677; H01L21/683

KR20180002361U	2018-08-03
KR20030037280A	2003-05-14
KR100814494B1	2008-03-18
JP2006307896A	2006-11-09
KR20160109363A	2016-09-21

B&IP-JOOWON PATENT AND LAW FIRM (KR)

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