Title:
MULTILAYER POLYESTER FILM FOR DRY FILM RESISTS
Document Type and Number:
WIPO Patent Application WO/2024/057778
Kind Code:
A1
Abstract:
[Problem] To provide a multilayer polyester film for dry film resists, the multilayer polyester film having excellent lamination adequacy at high temperatures, while having excellent resist characteristics and excellent sliding properties with respect to a metal roll. [Solution] A multilayer polyester film for dry film resists, the multilayer polyester film being composed of two or more layers wherein the skewness Ssk of surface A and the skewness Ssk of surface B satisfy Ssk-A > Ssk-B, and the surface A and surface B satisfy the requirements described below. (1) The number of projections that have a height of not less than 10 nm but less than 20 nm from the reference surface of the surface A is more than 3,000 per mm2 but less than 14,000 per mm2.
(2) The skewness Ssk-A is 1.0 to 4.0.
(3) The skewness Ssk-B is -0.1 to 1.0.
(4) ((Ssk-A) - (Ssk-B)) is 0.1 to 3.0.
Inventors:
SATO KOHEI (JP)
SENDAI TOSHIHIRO (JP)
HIGASHIOJI TAKUJI (JP)
SENDAI TOSHIHIRO (JP)
HIGASHIOJI TAKUJI (JP)
Application Number:
PCT/JP2023/028897
Publication Date:
March 21, 2024
Filing Date:
August 08, 2023
Export Citation:
Assignee:
TORAY INDUSTRIES (JP)
International Classes:
G03F7/11; B32B27/36; G03F7/004; G03F7/09
Domestic Patent References:
| WO2021172455A1 | 2021-09-02 |
Foreign References:
| JP2022061012A | 2022-04-15 | |||
| JP2021001284A | 2021-01-07 |
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