Title:
MICROWAVE HEATING APPARATUS, AND METHOD FOR MANUFACTURING ALUMINUM NITRIDE BY USING SAME
Document Type and Number:
WIPO Patent Application WO/2022/181857
Kind Code:
A1
Abstract:
A microwave heating apparatus according to the present invention comprises: a housing; a drum part which is rotatably arranged inside the housing and into which an object to be heated and gas are introduced; and at least one magnetron, which applies microwaves to the drum part to heat the drum part. If a microwave heating apparatus and a method for manufacturing aluminum nitride by using same, according to the present invention, are used, aluminum nitride can be manufactured at a temperature even lower than a conventional process temperature, and thus manufacturing time is reduced. In addition, compared with an electrical heating apparatus, the microwave heating apparatus according to the present invention can significantly reduce a power amount.
Inventors:
JUNG JANG-YOUN (KR)
JEON EUY-SIK (KR)
SOHN DONG-GOO (KR)
KIM JAE-KYUNG (KR)
JEON EUY-SIK (KR)
SOHN DONG-GOO (KR)
KIM JAE-KYUNG (KR)
Application Number:
PCT/KR2021/002488
Publication Date:
September 01, 2022
Filing Date:
February 26, 2021
Export Citation:
Assignee:
NAT UNIV KONGJU IND UNIV COOP FOUND (KR)
JUNG JANG YOUN (KR)
JUNG JANG YOUN (KR)
International Classes:
F27B7/34; C22C1/05; C22C29/16; C22F1/04; F27B7/06
Foreign References:
| KR20130112894A | 2013-10-14 | |||
| KR20110035227A | 2011-04-06 | |||
| JP2011219309A | 2011-11-04 | |||
| KR101112759B1 | 2012-03-13 | |||
| JP2014077555A | 2014-05-01 | |||
| EP0434166A1 | 1991-06-26 | |||
| KR20210079055A | 2021-06-29 |
Attorney, Agent or Firm:
KIM, Jin-dong (KR)
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