Title:
METHOD FOR MANUFACTURING JOSEPHSON JUNCTION ELEMENT AND METHOD FOR MANUFACTURING QUANTUM BIT
Document Type and Number:
WIPO Patent Application WO/2023/203679
Kind Code:
A1
Abstract:
This method for manufacturing a Josephson junction element comprises: a step for forming a mask layer on a substrate; a step for forming a first superconductive film on the substrate through first film formation from a first oblique direction, using the mask layer as a mask; a step for forming an insulating film on the surface of the first superconductive film; and a step for forming a second superconductive film having a region that overlaps the first superconductive film with the insulating film interposed therebetween through second film formation from a second oblique direction, using the mask layer as a mask. The step for forming the mask layer includes forming a mask layer having a first mask pattern that is positioned in a first region of the substrate and includes a first opening extending along the incidence direction of the film-forming material used in one of the first and second film formations and a second opening extending in a direction intersecting the first opening, and a second mask pattern that is positioned in a second region of the substrate and includes a third opening extending inclined relative to the first opening along the incidence direction of the film-forming material used in the one film formation and a fourth opening extending in a direction intersecting the third opening, the second region being positioned closer to an end portion of the substrate than the first region.
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Inventors:
TAKAHASHI TSUYOSHI (JP)
Application Number:
PCT/JP2022/018279
Publication Date:
October 26, 2023
Filing Date:
April 20, 2022
Export Citation:
Assignee:
FUJITSU LTD (JP)
International Classes:
H01L39/24
Foreign References:
| JP2021503171A | 2021-02-04 | |||
| JP2020535461A | 2020-12-03 | |||
| US20210399199A1 | 2021-12-23 | |||
| US20210313507A1 | 2021-10-07 | |||
| US20210135085A1 | 2021-05-06 |
Attorney, Agent or Firm:
KATAYAMA, Shuhei (JP)
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