Title:
窒化物の転換によるエピタキシャル酸化物膜
Document Type and Number:
Japanese Patent JP2004511411
Kind Code:
A
Abstract:
The present invention relates to oxides on suitable substrates, as converted from nitride precursors.
Inventors:
Sambashivan, thunker
Burnett, Scott, A.
Kim, Ilwon
Leschener, John, W.
Burnett, Scott, A.
Kim, Ilwon
Leschener, John, W.
Application Number:
JP2002535179A
Publication Date:
April 15, 2004
Filing Date:
October 12, 2001
Export Citation:
Assignee:
Applied Thin Films, Incorporated
International Classes:
C30B29/22; C23C8/02; C23C14/06; C23C14/08; C30B23/02; C30B33/00; H01L21/318; H01L39/24; (IPC1-7): C30B29/22; C23C14/06; C23C14/08; H01L21/318; H01L39/24
Attorney, Agent or Firm:
Yukio Ono
Tomoko Inazumi
Tomoko Inazumi