Title:
INSPECTION METHOD, INSPECTION DEVICE, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2024/057962
Kind Code:
A1
Abstract:
The present invention comprises: an acquisition step (S12) for acquiring a one-dimensional brightness profile by subjecting an inspection image in a pixel area of a display panel photographed by a photographing device to image processing for compressing the brightness of the inspection image into one-dimensional brightness; a generation step (S13) for generating a frequency spectrum intensity profile by Fourier-transforming the one-dimensional brightness profile; a calculation step (S14) for calculating the magnification of the photographing device from one or more peak positions in the frequency spectrum intensity profile on the basis of the periodic structure of pixels shown in the pixel area; and an estimation step (S15) for estimating a current focus position, which is the focus position of the photographing device in the inspection image, from the calculated magnification and magnification information indicating a relationship between a focus position and magnification of the photographing device.
Inventors:
HASHIMOTO SHINICHIRO
Application Number:
PCT/JP2023/031889
Publication Date:
March 21, 2024
Filing Date:
August 31, 2023
Export Citation:
Assignee:
JDI DESIGN AND DEV G K (JP)
International Classes:
G01M11/00; G03B13/36; G09F9/00; H04N23/67
Foreign References:
| JP2020042955A | 2020-03-19 | |||
| JP2010181234A | 2010-08-19 | |||
| JP2012004664A | 2012-01-05 | |||
| JP2010122497A | 2010-06-03 | |||
| JP2022038611A | 2022-03-10 |
Attorney, Agent or Firm:
YOSHIKAWA, Shuichi et al. (JP)
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