Title:
GAS LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/057536
Kind Code:
A1
Abstract:
This gas laser apparatus comprises: a monitor module that includes an optical plate housed in a housing unit and an incident region on which light is incident, the monitor module being slidable on the optical plate; a positioning member that is disposed on the optical plate to position the monitor module in a predetermined position on the optical plate; and a guide that extends in a direction parallel to the optical axis of light travelling toward the incident region to guide the monitor module toward the positioning member in the direction parallel to the optical axis of light. The monitor module includes a through-hole that penetrates through the monitor module in the direction parallel to the optical axis of light, and that is provided in a position displaced from the incident region. The monitor module slides on the optical plate to the predetermined region in a direction orthogonal to the optical axis of light, slides along the guide in the direction parallel to the optical axis of light toward the positioning member, which is spaced apart from the predetermined region in the direction parallel to the optical axis of light, and is then fixed in the internal space of the housing unit by threaded engagement of a fixing member penetrating through the through-hole with the positioning member.
Inventors:
KAWASHIMA YUKI (JP)
ISHII TAKUYA (JP)
NAGAHAMA KENSHIRO (JP)
ISHII TAKUYA (JP)
NAGAHAMA KENSHIRO (JP)
Application Number:
PCT/JP2022/034778
Publication Date:
March 21, 2024
Filing Date:
September 16, 2022
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/02; G02B7/00; G03F7/20; H01S3/00; H01S3/22
Foreign References:
| JP2021060466A | 2021-04-15 | |||
| JP2019092023A | 2019-06-13 | |||
| JP2013174583A | 2013-09-05 | |||
| JP2002111099A | 2002-04-12 | |||
| JPH05167148A | 1993-07-02 | |||
| JPS61243950A | 1986-10-30 | |||
| CN111624730A | 2020-09-04 |
Attorney, Agent or Firm:
MORIMURA Yasuo (JP)
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