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Title:
FOREIGN MATTER REMOVAL DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/048804
Kind Code:
A1
Abstract:
A foreign matter removal device comprises a chamber including a fluid, and a magnet assembly below the chamber. The chamber comprises a loading portion for loading a first object, a second object, and a third object into the fluid, a first trap region for trapping the first object, a second trap region which is adjacent to the first trap region so as to trap the second object, and a third trap region which is adjacent to the second trap region so as to trap the third object. The first object is a first foreign matter, the second object is a semiconductor light-emitting device, and the third object is a second foreign matter.

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Inventors:
BYUN YANGWOO (KR)
SONG HOOYOUNG (KR)
Application Number:
PCT/KR2022/012896
Publication Date:
March 07, 2024
Filing Date:
August 29, 2022
Export Citation:
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Assignee:
LG ELECTRONICS INC (KR)
International Classes:
H01L21/67; B03C1/18
Domestic Patent References:
WO2021236552A12021-11-25
Foreign References:
KR20200021968A2020-03-02
KR20200026766A2020-03-11
KR20190135862A2019-12-09
JP2020025064A2020-02-13
Attorney, Agent or Firm:
HAW, Yong Noke (KR)
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