Title:
FLOW RATE CONTROLLER AND DRIVE DEVICE EQUIPPED WITH SAME
Document Type and Number:
WIPO Patent Application WO/2021/044782
Kind Code:
A1
Abstract:
A flow rate controller (12) and a drive device (10) are provided with: a cylinder flow passage (21) connected to an air cylinder (14); a main flow passage (22) for supplying air to and discharging air from the air cylinder (14); an auxiliary flow passage (23) that has a first throttle valve (24) and through which exhaust air discharged from the air cylinder (14) passes with a smaller flow rate than that of the main flow passage (22); a switch valve (26) that switches between a first position in which the cylinder flow passage (21) communicates with the main flow passage (22) and a second position in which the cylinder flow passage (21) communicates with the auxiliary flow passage (23); and a pilot air adjustment part (30) that guides a portion of the exhaust air from the air cylinder (14) as pilot air to the switch valve (26).
Inventors:
TAKAKUWA YOUJI (JP)
KAZAMA AKIHIRO (JP)
ASAHARA HIROYUKI (JP)
MONDEN KENGO (JP)
KAZAMA AKIHIRO (JP)
ASAHARA HIROYUKI (JP)
MONDEN KENGO (JP)
Application Number:
PCT/JP2020/029601
Publication Date:
March 11, 2021
Filing Date:
August 03, 2020
Export Citation:
Assignee:
SMC CORP (JP)
International Classes:
F15B11/06; F15B11/00
Foreign References:
| JPS63275802A | 1988-11-14 | |||
| JPH05106605A | 1993-04-27 | |||
| JP2002013504A | 2002-01-18 | |||
| JPS5835001U | 1983-03-07 | |||
| DE102006049491A1 | 2008-04-24 | |||
| JP5578502B2 | 2014-08-27 |
Other References:
See also references of EP 4027024A4
Attorney, Agent or Firm:
CHIBA Yoshihiro et al. (JP)
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