FLOW RATE CONTROL VALVE

WIPO Patent Application WO/2023/188394

A1

Provided is a flow rate control valve that is capable of suppressing contamination of a controlled fluid by particles, maintaining a high level of cleanness of the controlled fluid, and rapidly controlling a minute flow. The flow rate control valve comprises a valve block (2), a diaphragm (1), and an actuator (3). Due to minute pressure received by the diaphragm (1) from the actuator (3), a fluid which has flowed through one flow path formed in an upstream part (2a) of the valve block (2) passes through a gap between an inner surface of the valve block (2) and an inner surface of the diaphragm (1), and is discharged from another flow path formed in a downstream part (2b) of the valve block (2). A peripheral part of the diaphragm (1) and an upper end surface of the valve block (2) are welded so as to be integral with each other. There is no level difference or gap between the inner peripheral surface of the diaphragm (1) and the inner peripheral surface of the valve block (2) at the welded part, and the inner peripheral surface of the diaphragm (1) and the inner peripheral surface of the valve block (2) are flush.

WO/2014/076242	SANITARY VALVE
JPS55123056	DIAPHRAGM VALVE

SHINMURA HIDENOBU (JP)
KIDO KEIJI (JP)
NOGUCHI MICHITAKA (JP)
FUKUDA MASARU (JP)
TSUTSUMI RYOSUKE (JP)

PCT/JP2022/016885

October 05, 2023

March 31, 2022

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KOFLOC CORP (JP)
YOHWA CO LTD (JP)

F16K7/16; F16K31/02

JP2020200840A	2020-12-17
JP2022039472A	2022-03-10
JP2001027333A	2001-01-30
JP2011214627A	2011-10-27

IWATANI Ryo (JP)

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