Title:
ELECTRON TUBE
Document Type and Number:
WIPO Patent Application WO/2014/038317
Kind Code:
A1
Abstract:
This electron tube (1) is provided with the following: a tubular housing (2) with an electrically insulating surface on the inside thereof; and an electrically resistive film (31) coating said electrically insulating surface. Said electrically resistive film (31) has either a mixed structure comprising an electrically resistive material and a conductive material or a layered structure comprising an electrically resistive layer and a conductive layer, formed by atomic layer deposition. The use of atomic layer deposition makes it possible to form a strong, compact electrically resistive film on the abovementioned electrically insulating surface, said electrically resistive film having a desired resistance, without including a binder or other such material. Also, making the electrically resistive film slightly conductive makes it possible to stabilize voltage-tolerance characteristics by minimizing voltage-tolerance defects due to static buildup or the like on the electrically insulating surface.
Inventors:
HAMANA YASUMASA (JP)
NAGATA TAKAAKI (JP)
NAKAMURA KIMITSUGU (JP)
NAGATA TAKAAKI (JP)
NAKAMURA KIMITSUGU (JP)
Application Number:
PCT/JP2013/070735
Publication Date:
March 13, 2014
Filing Date:
July 31, 2013
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
H01J5/10; H01J29/88; H01J31/50
Foreign References:
| JPS50112053U | 1975-09-12 | |||
| JPS585319Y2 | 1983-01-29 | |||
| JPS51131263A | 1976-11-15 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
Download PDF: