Title:
ELECTRON MICROSCOPE AND IMAGE CAPTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2023/248272
Kind Code:
A1
Abstract:
The problem of an axisymmetric electron gun structure is that some of gas molecules flowing in from a relatively low-vacuum chamber reach a photoelectric film, thereby causing deterioration of an NEA surface, instability of an emission current, and shortening of the life of the photoelectric film. This electron microscope is provided with: an excitation light source, a photoelectric film formed on a transparent substrate; a condensing lens for condensing excitation light onto the photoelectric film; an anode electrode for accelerating an electron beam generated by the excitation light being condensed and projected onto the photoelectric film; a first differential pumping diaphragm having a passage hole in an off-axis location and disposed on the photoelectric film side; and a second differential pumping diaphragm having a passage hole on the optical axis and disposed on the sample side. The electron microscope is provided with a deflector for controlling the trajectory of the electron beam between the first differential pumping diaphragm and the second differential pumping diaphragm.
Inventors:
MORISHITA HIDEO (JP)
OHSHIMA TAKASHI (JP)
IDE TATSURO (JP)
OSE YOICHI (JP)
TAKANE DAICHI (JP)
OHSHIMA TAKASHI (JP)
IDE TATSURO (JP)
OSE YOICHI (JP)
TAKANE DAICHI (JP)
Application Number:
PCT/JP2022/024470
Publication Date:
December 28, 2023
Filing Date:
June 20, 2022
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/073; H01J37/18
Domestic Patent References:
| WO2021192070A1 | 2021-09-30 | |||
| WO2019221119A1 | 2019-11-21 |
Foreign References:
| JP2011014244A | 2011-01-20 | |||
| JP2011003426A | 2011-01-06 | |||
| JP2011029185A | 2011-02-10 | |||
| JP2020537287A | 2020-12-17 |
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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