Title:
DEGREASING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/218792
Kind Code:
A1
Abstract:
Provided is a degreasing apparatus 100 with which maintenance can be performed at an appropriate time to ensure the maximal operation time of the apparatus, and even when an unexpected abnormality occurs, the factor of the abnormality can more accurately be identified. For that purpose, the apparatus comprises: a heating furnace 1 for accommodating and degreasing an object W to be treated; a measurement device 2 for measuring the amount of generated gas that has been generated in the degreasing, or a value that indirectly represents same (hereinafter, will be referred to as the generated gas amount); and an information processing device 7 for calculating, on the basis of the generated gas amount that has been measured by the measurement device 2, management information that is information relating to management including an inspection/maintenance time.
Inventors:
TANAKA SUGURU (JP)
Application Number:
PCT/JP2023/013496
Publication Date:
November 16, 2023
Filing Date:
March 31, 2023
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
C04B35/638; F27B5/18; F27D19/00
Foreign References:
| US20200393126A1 | 2020-12-17 | |||
| JP2004218005A | 2004-08-05 | |||
| JPS62180038U | 1987-11-16 | |||
| JP2022056011A | 2022-04-08 | |||
| JP2021139599A | 2021-09-16 |
Attorney, Agent or Firm:
NISHIMURA, Ryuhei et al. (JP)
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