Title:
COMPOSITE SUBSTRATE AND METHOD FOR PRODUCING COMPOSITE SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2023/026888
Kind Code:
A1
Abstract:
The present invention provides a composite substrate which is suppressed in occurrence of a warp. A composite substrate according to one embodiment of the present invention comprises a supporting substrate and a piezoelectric film that is arranged above the supporting substrate; and the piezoelectric film is configured from a polycrystalline body that has a degree of the c-axis orientation of 80% or less as determined by a Lotgering method.
Inventors:
UNO YUDAI (JP)
TAI TOMOYOSHI (JP)
NAMERIKAWA MASAHIKO (JP)
TAI TOMOYOSHI (JP)
NAMERIKAWA MASAHIKO (JP)
Application Number:
PCT/JP2022/030873
Publication Date:
March 02, 2023
Filing Date:
August 15, 2022
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
H03H3/08; H03H9/25
Domestic Patent References:
| WO2021141081A1 | 2021-07-15 | |||
| WO2019102952A1 | 2019-05-31 |
Foreign References:
| JP2011251866A | 2011-12-15 | |||
| JP2007088442A | 2007-04-05 | |||
| JP2015216195A | 2015-12-03 | |||
| JP2013110180A | 2013-06-06 | |||
| JP2013128006A | 2013-06-27 | |||
| JP2007223840A | 2007-09-06 | |||
| JP2014187094A | 2014-10-02 |
Attorney, Agent or Firm:
MOMII Takafumi (JP)
Download PDF:
Previous Patent: SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
Next Patent: HEAT-GENERATING DEVICE AND BOILER
Next Patent: HEAT-GENERATING DEVICE AND BOILER