Title:
COMPOSITE POLISHING PAD INCLUDING CARBON NANOTUBES, AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2023/085471
Kind Code:
A1
Abstract:
The present invention provides a composite polishing pad for CMP, and a method for producing same. The composite polishing pad for CMP comprises: a polymer substrate layer including a plurality of protrusions formed on the upper surface thereof; and a carbon nanotube layer including carbon nanotubes embedded in and fixed to the upper surface of the substrate layer.
Inventors:
MIN BYUNG JU (KR)
HONG SEOK JI (KR)
KIM SEUNG GEUN (KR)
CHOI JUNG HEE (KR)
KANG MIN WOO (KR)
OH NAM GUE (KR)
KIM SAN HA (KR)
JEONG JI HUN (KR)
RYU HYUN JUN (KR)
KANG SUK KYUNG (KR)
KIM SEONG JAE (KR)
HONG SEOK JI (KR)
KIM SEUNG GEUN (KR)
CHOI JUNG HEE (KR)
KANG MIN WOO (KR)
OH NAM GUE (KR)
KIM SAN HA (KR)
JEONG JI HUN (KR)
RYU HYUN JUN (KR)
KANG SUK KYUNG (KR)
KIM SEONG JAE (KR)
Application Number:
PCT/KR2021/016562
Publication Date:
May 19, 2023
Filing Date:
November 12, 2021
Export Citation:
Assignee:
KPX CHEMICAL CO LTD (KR)
KOREA ADVANCED INST SCI & TECH (KR)
KOREA ADVANCED INST SCI & TECH (KR)
International Classes:
B24B37/24; B24B37/22; B24D11/00; B29C33/42; B29C33/44
Foreign References:
| KR20210130629A | 2021-11-01 | |||
| JP2019178223A | 2019-10-17 | |||
| KR20180066126A | 2018-06-18 | |||
| KR20150044238A | 2015-04-24 | |||
| JP2001071269A | 2001-03-21 | |||
| KR20210002429A | 2021-01-08 |
Other References:
RYU HYUN JUN, KIM DONG GEUN, KANG SUKKYUNG, JEONG JI-HUN, KIM SANHA: "Mechanical Abrasion by Bi-layered Pad Micro-Asperity in Chemical Mechanical Polishing", CIRP ANNALS., ELSEVIER BV, NL, CH, FR, vol. 70, no. 1, 1 January 2021 (2021-01-01), NL, CH, FR , pages 273 - 276, XP093065327, ISSN: 0007-8506, DOI: 10.1016/j.cirp.2021.04.012
KANG, SUKKYUNG ET AL.: "Fabrication of Fixed-abrasive Pads Using Vertical Aligned CNTs and Analysis of its Mechanical Polishing Performance", PROCEEDINGS OF KSPE 2021 SPRING CONFERENCE, May 2021 (2021-05-01), XP009546306
KANG, SUKKYUNG ET AL.: "Abrasive polishing using composite pads with fixed vertically aligned carbon nanotubes", INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING AND SUSTAINABLE MANUFACTURING (PRESM 2021), 21 July 2021 (2021-07-21), pages 1 - 13, XP009546435, Retrieved from the Internet
KANG, SUKKYUNG ET AL.: "Fabrication of Fixed-abrasive Pads Using Vertical Aligned CNTs and Analysis of its Mechanical Polishing Performance", PROCEEDINGS OF KSPE 2021 SPRING CONFERENCE, May 2021 (2021-05-01), XP009546306
KANG, SUKKYUNG ET AL.: "Abrasive polishing using composite pads with fixed vertically aligned carbon nanotubes", INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING AND SUSTAINABLE MANUFACTURING (PRESM 2021), 21 July 2021 (2021-07-21), pages 1 - 13, XP009546435, Retrieved from the Internet
Attorney, Agent or Firm:
KIM, Sung Ho (KR)
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