Title:
AIR PRESSURE BALANCE VALVE, AIR PRESSURE BALANCE METHOD, AND LOAD LOCK CHAMBER
Document Type and Number:
WIPO Patent Application WO/2023/151184
Kind Code:
A1
Abstract:
An air pressure balance valve, an air pressure balance method, and a load lock chamber. The air pressure balance valve comprises: a valve body (11), the valve body (11) comprising an air inlet end (111) and an air outlet end (112), the air inlet end (111) being used for being communicated with a first air pressure region, and the air outlet end (112) being used for being communicated with a second air pressure region, and the first air pressure region and the second air pressure region being in a relatively low pressure state and a relatively high pressure state; a one-way valve (12) located in the valve body (11) and used for adjusting the pressure balance between the first air pressure region and the second air pressure region; and a buffering assembly (13) located between the air inlet end (111) and the one-way valve (12), the buffering assembly (13) being used for adjusting pressure on the surface of the one-way valve (12).
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Inventors:
LI WENZHE (CN)
ZHANG WENBO (CN)
ZHANG WENBO (CN)
Application Number:
PCT/CN2022/087386
Publication Date:
August 17, 2023
Filing Date:
April 18, 2022
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
F16K27/00; F16K47/08
Foreign References:
| CN206802412U | 2017-12-26 | |||
| CN104620353A | 2015-05-13 | |||
| CN213236103U | 2021-05-18 | |||
| CN1925110A | 2007-03-07 | |||
| CN212360209U | 2021-01-15 | |||
| CN211288292U | 2020-08-18 | |||
| US20040035476A1 | 2004-02-26 |
Attorney, Agent or Firm:
CHINA PAT INTELLECTUAL PROPERTY OFFICE (CN)
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