Title:
OPTICAL FILTER, LIGHT AMOUNT ADJUSTMENT DEVICE, AND IMAGING APPARATUS
Document Type and Number:
Japanese Patent JP2020064256
Kind Code:
A
Abstract:
To provide an optical filter having an infrared shielding function and an ND function which have good adhesion and reduce adhesion of a foreign matter due to electrification while suppressing warpage and undulation.SOLUTION: An optical filter of the present invention is the optical filter in which an optical interference thin film laminate consisting of a plurality of thin films having at least different refractive indexes and a light absorbing thin film laminate consisting of a light absorbing film and an inorganic film are formed on a substrate in this order from a substrate side. The light interference thin film laminate and the light absorption thin film laminate have stress characteristics in different directions with respect to the substrate, and a stress buffer film is formed between the light interference thin film laminate and the light absorption thin film laminate.SELECTED DRAWING: Figure 1
Inventors:
SATO YASUHIRO
Application Number:
JP2018197774A
Publication Date:
April 23, 2020
Filing Date:
October 19, 2018
Export Citation:
Assignee:
CANON DENSHI KK
International Classes:
G02B5/22; B32B7/023; G02B5/28; G03B9/00; G03B11/00