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WO/2024/087079A1 |
The present disclosure belongs to the technical field of micro-electro-mechanical systems (MEMSs). Provided are an MEMS device and a manufacturing method therefor, and an electronic device. The MEMS device in the present disclosure compr...
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WO/2024/086984A1 |
The embodiments of the present disclosure provide an MEMS device and an electronic device. The MEMS device comprises: a base substrate; an electrode structure, which is located on the base substrate and comprises a first ground electrode...
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WO/2024/049888A1 |
A microelectromechanical system (MEMS) switch (100) that is implemented with a coplanar waveguide (104). The MEMS switch (100) includes an input terminal (124) and an output terminal (128). The MEMS switch (100) includes a beam (132) ext...
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WO/2024/044758A1 |
Materials with electroprogrammable stiffness and adhesion can enhance the performance of robotic systems but achieving large changes in stiffness and adhesive forces in real time is an ongoing challenge. Electroadhesive clutches can rapi...
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WO/2024/033770A1 |
The invention relates to a microelectromechanical systems (MEMS) switch (201'), comprising a substrate (202'), at least one signal input line (203'), at least one signal output line (204'), at least one contact zone formed on a contact z...
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WO/2023/206154A1 |
An MEMS switch and a preparation method therefor, and an electronic device. The MEMS switch comprises: a substrate (1), a coplanar waveguide line structure provided on one side of the substrate (1), an isolation structure provided on the...
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WO/2023/201488A1 |
Provided are a microelectromechanical system switch and a communication device, comprising a substrate (101); a direct-current bias line (102) located on one side of the substrate (101); a first signal transmission line (103) and a secon...
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WO/2023/159457A1 |
The present disclosure belongs to the technical field of communications. Provided are an antenna and an electronic device. The antenna in the present disclosure comprises a dielectric substrate, and a first radiation patch and at least o...
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WO/2023/159342A1 |
Provided are a micro-electro-mechanical system switch and a manufacturing method therefor. The micro-electro-mechanical system switch comprises an insulating substrate, a drive electrode, a first insulating layer, a first signal transmis...
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WO/2023/135083A1 |
The invention relates to a contact element (10a…10n) of a MEMS relay (100), having a defined number greater than one of electrically conductive contact bodies (1a…1n), the contact bodies (1a…1n) being arranged at least partially wi...
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WO/2023/129815A1 |
A micro-relay switch array may comprise an array of micro-relays disposed on a substrate, and a cap disposed over the array of micro-relays, thereby encapsulating the array of micro-relays. The micro-relay array may further comprise an a...
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WO/2023/078684A1 |
The invention relates to a relay comprising a housing and a microelectromechanical (MEMS) component having a MEMS switch that can be switched between two stable states. The relay further comprises an application-specific integrated circu...
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WO/2023/080627A1 |
A switch included in an electronic device according to various embodiments may comprise: a substrate; a first transmission line disposed on the substrate in a first direction to be connected to an input terminal and an output terminal of...
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WO/2023/075938A1 |
An electronic device includes a microelectromechanical system (MEMS) rectifier. The MEMS rectifier (100) includes a mainboard (102) and a sub-board (112). The mainboard has one or more radiofrequency (RF) inputs (104) configured to recei...
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WO/2023/053614A1 |
This switching regulator has a fixed electrode, a movable electrode that is elastically supported by an elastic support part and that faces the fixed electrode, and a connection part that connects or disconnects a power supply line in ac...
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WO/2023/023976A1 |
The present disclosure relates to the technical field of microelectronic mechanical systems, and provides a radio frequency microelectronic mechanical switch and a radio frequency device, capable of at least partially solving the problem...
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WO/2022/272282A1 |
A switch device may comprise a micro-relay disposed between a first terminal and a second terminal. The micro-relay may be configured to selectively electrically couple the first terminal to the second terminal. The switch device may fur...
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WO/2022/247064A1 |
The present invention provides a high-reliability capacitive RF MEMS switch, comprising a substrate, a driving member provided inside the substrate, a sliding member provided on the substrate, and a transmission member provided in the su...
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WO/2022/243017A1 |
The invention proceeds from a micromechanical switch having a first electrical contact (11) and a second electrical contact (12) as well as a deflectable micromechanical switching part (30) with a first contact bridge (31) for switching ...
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WO/2022/243746A1 |
Impedance paths for integrated circuits having microelectromechanical systems (MEMS) switches that allow for electrical charge to bleed from circuit nodes to fixed electric potentials (e.g., ground) are described. Such paths are referred...
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WO/2022/245797A1 |
Microelectromechanical systems (MEMS) switches are disclosed. Parallel configurations of back-to-back MEMS switches are disclosed in some embodiments. An isolation connection of constant electrical potential may be made to a midpoint of ...
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WO/2022/218595A1 |
Disclosed is a microelectromechanical switching element (1) comprising: - a multilayer carrier substrate (50) having a functional layer (53) in which a deflectable bending element (10) is formed; and - a sensor element (20, 20a-20h) whic...
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WO/2022/189056A1 |
The invention relates to an electrically actuatable MEMS switch, comprising a substrate (1) on which a first insulation layer (100), a silicon layer (110), a second insulation layer (14) and a metal layer (16) are arranged one on top of ...
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WO/2022/189128A1 |
A microelectromechanical switching element (1) is specified, comprising – a multilayered carrier substrate (100) having a first layer (110) serving as carrier layer, an electrically insulating second layer (120), and a third layer (130...
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WO/2022/153697A1 |
This MEMS switch comprises: a substrate that has a first main surface and a second main surface on the opposite side thereof, and also has a cavity formed therein; an actuator unit that is formed on the first main surface side of the sub...
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WO/2022/153696A1 |
This MEMS switch comprises: a substrate that has a cavity formed in the interior thereof and that has a first principal surface and a second principal surface on the opposite side thereof; a flexible part that is flexible and is fixed in...
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WO/2022/120274A1 |
An electrically conductive membrane pressure switch, such as a graphene membrane pressure switch. The electrically conductive membrane pressure switch includes an electrically conductive membrane, source, drain plane, actuator, and movab...
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WO/2022/112477A1 |
The invention relates to a micromechanical relay device. Said micromechanical relay device comprises a substrate having a first electrical contact and a second electrical contact. The relay device furthermore comprises a contact bridge w...
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WO/2022/096311A1 |
The invention relates to a circuit arrangement (1) for a digital input of an electronic device (30), comprising: - an input terminal (10), which functions as a digital input, on an input side (E); - an output terminal (11), which functio...
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WO/2022/069469A1 |
The electronic module comprises an electrical circuit and at least one first MEMS switch having at least one first control contact having a first switching threshold voltage and at least one second MEMS switch having a second control con...
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WO/2022/002479A1 |
The invention relates to an electronic module, comprising at least one MEMS switch with a substrate and at least one semiconductor component, wherein the at least one semiconductor component is formed with the substrate and is connected ...
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WO/2021/243745A1 |
Disclosed is a MEMS capacitive switch, comprising a substrate (1), and a switch beam (4) and an effective electrode (3) which are arranged above the substrate (1). The switch beam (4) comprises a cross beam portion (42) arranged in paral...
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WO/2021/237770A1 |
The present utility model provides an MEMS capacitive switch and an electronic device. The MEMS capacitive switch comprises a substrate, a dielectric layer provided on the surface of the substrate, a metal beam erected above the dielectr...
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WO/2021/237769A1 |
The present utility model provides an MEMS capacitive switch, comprising a substrate, a dielectric layer provided on the surface of the substrate, a metal beam erected above the dielectric layer by means of anchor points, an effective el...
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WO/2021/115991A1 |
Devices, systems, methods, computer-implemented methods, apparatus, and/or computer program products that can facilitate a switch device that shifts frequency of a resonator in a quantum device are provided. According to an embodiment, a...
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WO/2021/097337A1 |
A micro-electromechanical (MEM) relay and its fabrication process. The MEM relay includes a movable actuator electrode anchored to a substrate with two cantilever beams. Below the actuator electrode, there are three fixed electrodes. The...
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WO/2021/026333A1 |
A method of manufacturing a MEMS device. The MEMS device has a cavity in which a beam will move to change the capacitance of the device. After most of the device build-up has occurred, sacrificial material is removed to free the beam wit...
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WO/2021/018888A1 |
In an arrangement of MEMS switches (20) with mobile elements (90), said MEMS switches (20) are interconnected in a total -cross-tied configuration (10).
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WO/2020/206585A1 |
Disclosed is a capacitive RF-MEMS switch. The switch comprises an insulating plate, first to third microstrip lines, an insulating dielectric, N anchor points, and a switch piece. The switch piece comprises a movable metal film and N ela...
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WO/2020/092324A1 |
An electro-technical device includes a first housing portion electrically isolated from a second housing portion with a point source being disposed within the first housing portion. A movable conductor is connected to the first portion a...
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WO/2020/005923A1 |
A method of mitigating self-actuation of a switch may comprise generating a tracking signal, based on an input signal that the switch is configured to convey, and combining the tracking signal with an actuating signal to generate a modif...
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WO/2019/129720A1 |
The field of the invention is that of RF-MEMS switches including a flexible membrane (1) positioned above a control electrode (2). The membrane and the control electrode of the switch according to the invention are made of ferromagnetic ...
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WO/2019/122896A1 |
A micro or nano electromechanical relay device (10) comprising a source electrode (204) an electrically conductive beam (202) comprising an arcuate portion (12a) coupled to the source electrode by an arm portion, first and second drain e...
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WO/2018/160732A1 |
Systems, devices, and related methods are disclosed for electromechanical transfer printing of 2D materials disposed on one substrate to another. The printing device can be configured to transfer a 2D material from a source substrate to ...
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WO/2018/115226A1 |
Disclosed are systems and methods of operation for capacitive radio frequency micro-electromechanical switches, such as CMUT cells for use in an ultrasound system. An RFMEMS may include substrate, a first electrode connected to the subst...
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WO/2018/063814A1 |
The present disclosure generally relates to the design of a MEMS ohmic switch which provides for a low-impact landing of the MEMS device movable plate on the RF contact and a high restoring force for breaking the contacts to improve the ...
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WO/2018/028947A1 |
The invention relates to a switch cell comprising a semiconductor switch element (6), a micro-electromechanical switch element (8) (MEMS), and an electronic actuation circuit (10), the semiconductor switch element (6) and the micro-elect...
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WO/2017/203141A1 |
The subject of the invention is a micro-electromechanical-system (MEMS) switch (1) formed in a substrate (2) and comprising a first RF signal line (3) and a second RF signal line (4), a deformable membrane (5), an activating means (7) co...
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WO/2017/198943A1 |
The present invention relates to a radio frequency micro-electromechanical switch (generally referred to using the acronyms RF MEMS) as well as to a method allowing such a switch to be produced.
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WO/2017/189806A1 |
A microelectromechanical resonant switch ("resoswitch") converts received radio frequency (RF) energy into a clock output. The resoswitch first accepts incoming amplitude- or frequency- shift keyed clock-modulated RF energy at a carrier ...
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