Title:
MEMS DEVICE AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/086984
Kind Code:
A1
Abstract:
The embodiments of the present disclosure provide an MEMS device and an electronic device. The MEMS device comprises: a base substrate; an electrode structure, which is located on the base substrate and comprises a first ground electrode, a signal transmission electrode and a second ground electrode, which are sequentially arranged on the base substrate at intervals; a metal film bridge, which spans above the signal transmission electrode and forms a cavity with the signal transmission electrode, wherein two ends of the metal film bridge are respectively electrically connected to the first ground electrode and the second ground electrode; and a support structure, which is fixedly arranged with the metal film bridge, wherein the Young's modulus of the support structure is greater than the Young's modulus of the metal film bridge.
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Inventors:
SHI YINGLI (CN)
Application Number:
PCT/CN2022/127098
Publication Date:
May 02, 2024
Filing Date:
October 24, 2022
Export Citation:
Assignee:
BOE TECH GROUP CO LTD (CN)
BEIJING BOE TECH DEVELOPMENT CO LTD (CN)
BEIJING BOE TECH DEVELOPMENT CO LTD (CN)
International Classes:
B81B7/02; H01H59/00
Attorney, Agent or Firm:
TDIP & PARTNERS (CN)
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