Title:
SEMICONDUCTOR PROCESS CHAMBER AND SEMICONDUCTOR PROCESS APPARATUS
Document Type and Number:
WIPO Patent Application WO/2024/093969
Kind Code:
A1
Abstract:
Disclosed in the present disclosure are a semiconductor process chamber and a semiconductor process apparatus, relating to the field of semiconductor apparatus. The semiconductor process chamber comprises a cavity and a lower electrode structure, the lower electrode structure being arranged in the cavity. In the lower electrode structure, a base is connected to the cavity by means of a cantilever, and an interface member and a bearing member are stacked on the base. A lining is annularly arranged outside the lower electrode structure, one end of the lining being electrically connected to the cavity, and the other end of the lining being electrically connected to the interface member. The first end of a shielding member is connected to the interface member, and the second end thereof is connected to the inner wall of the base. The axis of the first end of the shielding member does not coincide with the axis of the interface member, and the axis of the first end of the shielding member deviates from the axis of the interface member in the direction away from the cantilever. A radio frequency feed-in member passes through the shielding member and is connected to the bearing member. The semiconductor process apparatus comprises the semiconductor process chamber. The present disclosure may solve the problems of etching uniformity and the like caused by asymmetric geometric structures of elements in etching apparatuses.
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Inventors:
ZHAO JINRONG (CN)
WEI GANG (CN)
WU DONGYU (CN)
WANG HAILI (CN)
WEI GANG (CN)
WU DONGYU (CN)
WANG HAILI (CN)
Application Number:
PCT/CN2023/128177
Publication Date:
May 10, 2024
Filing Date:
October 31, 2023
Export Citation:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
H01L21/67; H01J31/32; H01L21/683
Domestic Patent References:
| WO2022057847A1 | 2022-03-24 |
Foreign References:
| CN115692263A | 2023-02-03 | |||
| CN114242554A | 2022-03-25 | |||
| CN101853766A | 2010-10-06 | |||
| CN111293025A | 2020-06-16 | |||
| CN112259429A | 2021-01-22 | |||
| CN114361000A | 2022-04-15 | |||
| CN207074639U | 2018-03-06 |
Attorney, Agent or Firm:
TEE & HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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